Abstract
In the previous chapter the developed technology and its limitations for several individual fabrication steps has been discussed. However, nothing was said about the sequence of the single steps for fabricating a functioning device. In the following two process chains are presented that allow for the fabrication of metallic as well as superconducting patterns using the individual process steps described above.
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© 2016 Springer Fachmedien Wiesbaden
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Bartolf, H. (2016). Device Manufacturing. In: Fluctuation Mechanisms in Superconductors. Springer Spektrum, Wiesbaden. https://doi.org/10.1007/978-3-658-12246-1_6
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DOI: https://doi.org/10.1007/978-3-658-12246-1_6
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Publisher Name: Springer Spektrum, Wiesbaden
Print ISBN: 978-3-658-12245-4
Online ISBN: 978-3-658-12246-1
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