In the previous chapter the developed technology and its limitations for several individual fabrication steps has been discussed. However, nothing was said about the sequence of the single steps for fabricating a functioning device. In the following two process chains are presented that allow for the fabrication of metallic as well as superconducting patterns using the individual process steps described above.
KeywordsProcess Chain Wire Bond Device Manufacture Individual Process Step Manufacturing Process Chain
Unable to display preview. Download preview PDF.