Device Manufacturing

Chapter

Abstract

In the previous chapter the developed technology and its limitations for several individual fabrication steps has been discussed. However, nothing was said about the sequence of the single steps for fabricating a functioning device. In the following two process chains are presented that allow for the fabrication of metallic as well as superconducting patterns using the individual process steps described above.

Keywords

Sapphire Harman 

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Copyright information

© Springer Fachmedien Wiesbaden 2016

Authors and Affiliations

  1. 1.Baden-DättwilSwitzerland

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