Ripple Pyrometry for Flash Lamp Annealing
Conventional temperature measurement is associated with radiation pyrometry. However, as shown above, this becomes a difficult task to perform in lamp-based annealing devices. Therefore, offline calibration procedures are usually involved which are based on calibration points such as the melting point or the point of recrystallization.
KeywordsAmplitude Modulation Thermal Radiation Wafer Surface Mechanical Oscillator Quartz Oscillator
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