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Ripple Pyrometry for Flash Lamp Annealing

Chapter
Part of the MatWerk book series (MW)

Abstract

Conventional temperature measurement is associated with radiation pyrometry. However, as shown above, this becomes a difficult task to perform in lamp-based annealing devices. Therefore, offline calibration procedures are usually involved which are based on calibration points such as the melting point or the point of recrystallization.

Keywords

Amplitude Modulation Thermal Radiation Wafer Surface Mechanical Oscillator Quartz Oscillator 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Fachmedien Wiesbaden 2015

Authors and Affiliations

  1. 1.Helmholtz-Zentrum Dresden-Rossendorf e.VDresdenGermany

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