High Vacuum Growth and Processing Systems
The maturity which the MBE technique has now achieved is reflected in the demand for high throughput, high yield MBE machines. A whole set of companies currently manufacture MBE-growth and MBE-related equipment that is sophisticated in design and reliable in application. Among the largest manufacturers which share the major part of the world market, the following six may be listed: ISA RIBER and VG SEMICON in Europe, VARIAN/TFTD and PERKIN-ELMER in the USA, and ANELVA and ULVAC in Japan.
KeywordsDeposition Chamber Beam Source Effusion Cell Computer Control System Inlet Line
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