High Vacuum Growth and Processing Systems

  • Marian A. Herman
  • Helmut Sitter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 7)


The maturity which the MBE technique has now achieved is reflected in the demand for high throughput, high yield MBE machines. A whole set of companies currently manufacture MBE-growth and MBE-related equipment that is sophisticated in design and reliable in application. Among the largest manufacturers which share the major part of the world market, the following six may be listed: ISA RIBER and VG SEMICON in Europe, VARIAN/TFTD and PERKIN-ELMER in the USA, and ANELVA and ULVAC in Japan.


Deposition Chamber Beam Source Effusion Cell Computer Control System Inlet Line 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1989

Authors and Affiliations

  • Marian A. Herman
    • 1
  • Helmut Sitter
    • 2
  1. 1.Institute of PhysicsPolish Academy of SciencesWarszawaPoland
  2. 2.Institut für ExperimentalphysikJohannes-Kepler-UniversitätLinz/AuhofAustria

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