Efficient ZnS:Mn Electroluminescent Films Grown by Metal Organic Chemical Vapor Deposition
Electroluminescent ZnS:Mn films grown by reduced pressure MOCVD are characterized in comparison with films deposited by the EB method. An important feature of the crystallinity is that the mean grain size as observed by X-ray diffraction line widths and by TEM images is larger in the MOCVD films than in the EB films. The intensities of PL and EL reach their maximum at Mn concentrations from 0.8 to 1.0 wt%, which is considerably higher than that for EB deposition (0.5 wt%). The MOCVD technique can provide about twice the EL efficiency as the EB method. This can be ascribed to the large grain size and the uniform Mn distribution.
KeywordsElectron Beam Metal Organic Chemical Vapor Deposition Diethyl Zinc Electron Beam Deposition Electron Beam Method
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