Abstract
The microstructure of polysilicon thin films and their interfaces to the silicon substrate or to thermally grown oxides determine strongly the electrical performance of silicon devices. Transmission electron microscopy (TEM) of thin cross-sections reveals structural details as a function of film depth whereas elemental analysis with high spatial resolution in a scanning TEM provides information on dopant distribution. The changes in microstructure and surface roughness of polysilicon films with parameters such as deposition temperature, type of dopant and annealing conditions is reviewed. Thermal oxidation of polysilicon can result in strongly nonplanar oxide/polysilicon interfaces. The morphology of the thin oxide film and segregation effects at the poly/monosilicon interface are discussed.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
H. Oppolzer, R. Falckenberg, E. Doering, J. Microscopy 118, 97 (1980)
T.I. Kamins, J. Electrochem. Soc. 127, 686 (1980)
G. Harbeke, L. Krausbauer, E.F. Steigmeier, A.E. Widmer, H.F. Kappert, G. Neugebauer, J. Electrochem. Soc. 131, 675 (1984)
M. Hendriks, S. Radelaar, A.M. Beers, J. Bloem, Thin Solid Films 113, 59 (1984)
P. Joubert, B. Loisel, Y. Chouan, L. Haji, J. Electrochem. Soc. 134, 2541 (1987)
D. Meakin, J. Stoemenos, P. Migliorato, N.A. Economou, J. Appl. Phys. 61, 5031 (1987)
D. Meakin, K. Papadopoulou, S. Friligkos, J. Stoemenos, P. Migliorato, N.A. Economou, J. Vac. Sci. Technol. B5, 1547 (1987)
D. Meakin, P.A. Coxon, P. Migliorato, J. Stoemenos, N.A. Economou, Appl. Phys. Lett.50., 1894 (1987)
R. Falckenberg, E. Doering, H. Oppolzer, Extended Abstracts, Fall 1979 Meeting of The Electrochemical Society (Los Angeles) 79–2, 1429 (1979)
F.S. Becker, H. Oppolzer, I. Weitzel, H. Eichermüller, H. Schaber, J. Appl. Phys. 56, 1233 (1984)
J. Washburn, Mat. Res. Soc. Symp. Proc. 2, 209 (1981)
M.K. Hatalis, D.W. Greve, J. Appl. Phys. 63, 2260 (1988)
R.B. Iverson, R. Reif, J. Appl. Phys. 62, 1675 (1987)
Y. Wada, S. Nishimatsu, J. Electrochem. Soc. 125, 1499 (1978)
H. Oppolzer, R. Falckenberg, E. Doering, Inst. Phys. Conf. Ser. 60, 283 (1981)
M.M. Mandurah, K.C. Saraswat, C.R. Helms, J. Appl. Phys. 51, 5755 (1980)
R. Angelucci, M. Severi, S. Solmi, Materials Chemistry and Physics 9, 235 (1983)
H. Oppolzer, W. Eckers, H. Schaber, J. de Physique 46, Suppl. No.4, C4–523 (1985)
C.R.M. Grovenor, P.E. Batson, D.A. Smith, C. Wong, Phil. Mag. A50, 409, (1984)
T. Makino, H. Nakamura, Solid-St. Electron. 24, 49 (1981)
L.R. Zheng, L.S. Hung, J.W. Mayer, Mat. Res. Soc. Symp. Proc. 106, 135 (1988)
T.I. Kamins, J. Electrochem. Soc. 126, 838 (1979)
R.B. Marcus, T.T. Sheng, J. Electrochem. Soc. 129, 1278 (1982)
R.B. Marcus, T.T. Sheng, J. Electrochem. Soc. 129, 1282 (1982)
H. Oppolzer, V. Huber, Inst. Phys. Conf. Ser. 67, 461 (1983)
V. Probst, H.J. Böhm, H. Schaber, H. Oppolzer, I. Weitzel, J. Electrochem. Soc. 135, 671 (1988)
H.J. Böhm, H. Wendt, H. Oppolzer, K. Masseli, R. Kassing, J. Appl. Phys. 62, 2784 (1987)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1989 Springer-Verlag Berlin, Heidelberg
About this paper
Cite this paper
Cerva, H., Oppolzer, H. (1989). Microstructure and Interfaces of Polysilicon in Integrated Circuits. In: Möller, H.J., Strunk, H.P., Werner, J.H. (eds) Polycrystalline Semiconductors. Springer Proceedings in Physics, vol 35. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-93413-1_48
Download citation
DOI: https://doi.org/10.1007/978-3-642-93413-1_48
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-93415-5
Online ISBN: 978-3-642-93413-1
eBook Packages: Springer Book Archive