SEM-EBIC Investigations of the Electrical Activity of Grain Boundaries in Germanium
The electrical activity of various grain boundaries (GBs) including subgrains and highly misorientated GBs, has been studied using the EBIC-mode of a scanning electron microscope. The crystallography of the defects has been characterized from electron channeling patterns (ECP) and X-ray topographs. The electrical behaviour of GBs has been found strongly affected by impurity segregation. Bright EBIC contrast observed at some GBs after annealing has been related to the degradation of the diffusion length of holes in the adjacent grains. EBIC observations performed at low temperature revealed the presence of a trapping process of the holes on a near-valence band level.
KeywordsFurnace Argon Recombination Germanium Channeling
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