SEM-EBIC Investigations of the Electrical Activity of Grain Boundaries in Germanium

  • N. Tabet
  • C. Monty
  • Y. Marfaing
Part of the Springer Proceedings in Physics book series (SPPHY, volume 35)


The electrical activity of various grain boundaries (GBs) including subgrains and highly misorientated GBs, has been studied using the EBIC-mode of a scanning electron microscope. The crystallography of the defects has been characterized from electron channeling patterns (ECP) and X-ray topographs. The electrical behaviour of GBs has been found strongly affected by impurity segregation. Bright EBIC contrast observed at some GBs after annealing has been related to the degradation of the diffusion length of holes in the adjacent grains. EBIC observations performed at low temperature revealed the presence of a trapping process of the holes on a near-valence band level.


Diffusion Length Subgrain Boundary Schottky Contact Bright Contrast Dark Contrast 
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  1. 1.
    “Grain boundaries in Semiconductors” M.R.S. Proceedings, vol.5, Ed. by J. Leamy, G.E. Pike and C.H. Seager, Elsevier (1982).Google Scholar
  2. 2.
    H.J. Leamy: J. Appl. Phys. 53, R51Google Scholar
  3. 3.
    C. Dianteil, A. Rocher: J. Phys. C1, 10, 43, 75 (1982).Google Scholar
  4. 4.
    J.L. Maurice: Rev. Phys. Appl. 22, 613 (1987).CrossRefGoogle Scholar
  5. 5.
    L.L. Kazmerski, P.E. Russel: J. Phys. C1, 10, 43, 171 (1982).Google Scholar
  6. 6.
    N. Tabet and C. Monty: Phil. Mag.B, 57, 6, 763 (1988).CrossRefGoogle Scholar
  7. 7.
    N. Tabet, C. Monty and Y. Marfaing: submitted.Google Scholar
  8. 8.
    C. Donolato: J. Appl. Phys. 54, 3, 1314 (1983).CrossRefGoogle Scholar
  9. 9.
    L.L. Kazmerski: Appl. Surf. Sci. 7, 55 (1980).Google Scholar
  10. 10.
    N. Tabet and R.J. Tarento: to be published in Phil. Mag.Google Scholar

Copyright information

© Springer-Verlag Berlin, Heidelberg 1989

Authors and Affiliations

  • N. Tabet
    • 1
  • C. Monty
    • 1
  • Y. Marfaing
    • 2
  1. 1.Laboratoire de Physique des MatériauxCNRSMeudonFrance
  2. 2.Laboratoire de Physique des SolidesCNRSMeudonFrance

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