SIMS Studies on Oxygen Adsorption on Aluminium and Its Alloys

  • D. Marton
  • Á Csanády
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 19)

Abstract

SIMS has been used widely for surface chemistry studies, i.e. to try to identify species formed on metal or semiconductor surfaces during their reaction with the gaseous ambience, the latter being mostly oxygen. These studies can provide reliable information if the SIMS method is combined with other surface sensitive methods as TDMS [1], IRS [2], etc. One of us has developed a new method of using SIMS to measure oxygen adsorption on silicon surface [3]. The present paper deals with this method for the analysis of oxygen adsorption on aluminium and some aluminium alloys.

Keywords

Bori 

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References

  1. 1.
    P. Beckmann, K.H. Müller, M. Schemmer and A. Benninghoven, in Secondary Ion Mass Spectrometry SIMS II, ed. by A. Benninghoven, C.A. Evans, Jr., R.A. Powell, R. Shimizu, H.A. Storms, Springer Series in Chemical Physics, Vol. 9 ( Springer, Berlin, Heidelberg, New York 1979 ) p. 137Google Scholar
  2. 2.
    E. Janssen, ibid. p. 171Google Scholar
  3. 3.
    D. Marton, Appl. in Surf. Sci. 5, 65 (1980)Google Scholar
  4. 4.
    D. Marton, V.K. Josepovits and A. Csanik, Surf. and Interface Anal. 1, 132 (1979)CrossRefGoogle Scholar
  5. 5.
    F. Pavlyâk, L. Bori, J. Giber and R. Buhl, Japan J. Appl. Phys. 16, 335 (1977)ADSCrossRefGoogle Scholar
  6. 6.
    A. Benninghoven, Surf. Sci. 28, 541 (1971)ADSCrossRefGoogle Scholar
  7. 6.
    W.H. Krueger and S.R. Pollack, Surf. Sci. 30, 263 (1972)Google Scholar
  8. 8.
    K. Wittmaack, Surf. Sci. 68, 118 (1977)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1982

Authors and Affiliations

  • D. Marton
    • 1
  • Á Csanády
    • 1
    • 2
  1. 1.Institute of PhysicsTechnical University BudapestBudapestHungary
  2. 2.ALUTERV-FKIBudapestHungary

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