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SIMS Studies on Oxygen Adsorption on Aluminium and Its Alloys

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Secondary Ion Mass Spectrometry SIMS III

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 19))

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Abstract

SIMS has been used widely for surface chemistry studies, i.e. to try to identify species formed on metal or semiconductor surfaces during their reaction with the gaseous ambience, the latter being mostly oxygen. These studies can provide reliable information if the SIMS method is combined with other surface sensitive methods as TDMS [1], IRS [2], etc. One of us has developed a new method of using SIMS to measure oxygen adsorption on silicon surface [3]. The present paper deals with this method for the analysis of oxygen adsorption on aluminium and some aluminium alloys.

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References

  1. P. Beckmann, K.H. Müller, M. Schemmer and A. Benninghoven, in Secondary Ion Mass Spectrometry SIMS II, ed. by A. Benninghoven, C.A. Evans, Jr., R.A. Powell, R. Shimizu, H.A. Storms, Springer Series in Chemical Physics, Vol. 9 ( Springer, Berlin, Heidelberg, New York 1979 ) p. 137

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  3. D. Marton, Appl. in Surf. Sci. 5, 65 (1980)

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Author information

Authors and Affiliations

  1. Institute of Physics, Technical University Budapest, H-1111, Budapest, Hungary

    D. Marton & Á Csanády

  2. ALUTERV-FKI, H-1389, Budapest, Hungary

    Á Csanády

Authors
  1. D. Marton
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  2. Á Csanády
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, D-4400, Münster, Fed. Rep. of Germany

    A. Benninghoven

  2. Physical Institute of the Technical University, H-1111, Budapest, Hungary

    J. Giber  & J. László  & 

  3. Department of Physical Chemistry and Radiology, Eötvös University, H-1111, Budapest, Hungary

    M. Riedel

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1982 Springer-Verlag Berlin Heidelberg

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Marton, D., Csanády, Á. (1982). SIMS Studies on Oxygen Adsorption on Aluminium and Its Alloys. In: Benninghoven, A., Giber, J., László, J., Riedel, M., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS III. Springer Series in Chemical Physics, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-88152-7_59

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  • DOI: https://doi.org/10.1007/978-3-642-88152-7_59

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-88154-1

  • Online ISBN: 978-3-642-88152-7

  • eBook Packages: Springer Book Archive

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