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Secondary Ion Mass Spectrometry SIMS III pp 297–300Cite as

Computer Peak Identification and Evaluation of SIMS Spectra

  • Conference paper

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 19))

Abstract

The most important problems in computer peak identification and evaluation of SIMS spectra of multicomponent systems are:

  1. (i)

    to find the possible ion species: (“variables”) atomic, cluster and molecule ions

  2. (ii)

    the determination of the total isotopic currents of these species

  3. (iii)

    the reliability of the identification and evaluation process.

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References

  1. R.Dobrozemsky, J. Vac. Sci. Technol. 9, 220 (1971)

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  2. W. Steiger, F. G. Rüdenauer, Vacuum 25, 409 (1975)

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  3. B.R. Kowalski, Anal. Chem. 47, 1152A (1975)

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  4. V.T. Cherepin, A.A. Kosyachov, G.I. Gudzenko, Int. J. Mass Spectrom. Ion Phys. 36, 225 (1980)

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Author information

Authors and Affiliations

  1. Department of Physical Chemistry and Radiology, Eötvös University, H-Budapest, Hungary

    M. Riedel

  2. Physical Institute of the Technical University, H-Budapest, Hungary

    J. Antal & S. Kugler

Authors
  1. J. Antal
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  2. S. Kugler
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  3. M. Riedel
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, D-4400, Münster, Fed. Rep. of Germany

    A. Benninghoven

  2. Physical Institute of the Technical University, H-1111, Budapest, Hungary

    J. Giber  & J. László  & 

  3. Department of Physical Chemistry and Radiology, Eötvös University, H-1111, Budapest, Hungary

    M. Riedel

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1982 Springer-Verlag Berlin Heidelberg

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Cite this paper

Antal, J., Kugler, S., Riedel, M. (1982). Computer Peak Identification and Evaluation of SIMS Spectra. In: Benninghoven, A., Giber, J., László, J., Riedel, M., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS III. Springer Series in Chemical Physics, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-88152-7_45

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  • DOI: https://doi.org/10.1007/978-3-642-88152-7_45

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-88154-1

  • Online ISBN: 978-3-642-88152-7

  • eBook Packages: Springer Book Archive

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