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Advances in Ion Probes A-DIDA

  • H. Frenzel
  • J. L. Maul
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 19)

Abstract

The basic concept of the ION PROBES A-DIDA was set up 10 years ago. While the basic concept proved to be highly successful, a number of advances in the A-DIDA design features could be introduced since the SIMS II conference, which considerably improved the analytical capability of the ION PROBES A-DIDA. The basic concept of the ION PROBES A-DIDA has already been described elsewhere [1,2]. Different to the horizontal configuration of the A-DIDA 2000 the new IONMICROPROBE A-DIDA 3000–30 is a vertical configuration, as commonly used in SEM design, with the primary ion beam coming from the top. The samples are mounted horizontally which allows running powder samples.

Keywords

Depth Profile Vertical Configuration Sample Transfer System Central Mode Control Introduction Chamber 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1982

Authors and Affiliations

  • H. Frenzel
    • 1
  • J. L. Maul
    • 1
  1. 1.ATOMIKA Technische Physik GmbHMünchenFed. Rep. of Germany

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