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Distortion of Secondary Ion Extraction Due to Sample Surface Irregularities

  • Conference paper
Secondary Ion Mass Spectrometry SIMS III

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 19))

Abstract

Hitherto numerous publications concerning the analytical application of Secondary Ion Mass Spectroscopy (SIMS) have appeared. In contrast, a rather limited number of investigations dealing with the influence of instumental effects on quantitative analysis have been published till now. One of these is the interpretation of the results of the comparative SIMS study of selected glasses NEWBURY showed that the relative sensitivity factors for the same element obtained by 22 different laboratories vary over more than one order of magnitude. Under the assumption that well characterized standards had been distributed to all cooperating laboratories the main reasons for deviations of such an extent must be supposed in different primary ion (PI) beam parameters and instrumental conditions incomparable to each other. Solely standardized conditions for creation, extraction, analysis, and detection of the secondary ions (SI) and mathematical compensation of every discriminating effect will lead to data that can be handled successfully by quantitative models.

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References

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Author information

Authors and Affiliations

  1. Zentrum für Forschung und Technologie Mikroelektronik, Dresden, DDR

    W. Bedrich, B. Koch, H. Mai, U. Seidenkranz, H. Syhre & R. Voigtmann

  2. Zentralinstitut für Festkörperphysik, Werkstofforschung der AdW der DDR, Dresden, DDR

    H. Mai, U. Seidenkranz & R. Voigtmann

  3. Zentralinstitut für Kernforschung der AdW der DDR, Rossdorf, DDR

    H. Syhre

Authors
  1. W. Bedrich
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  2. B. Koch
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  3. H. Mai
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  4. U. Seidenkranz
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  5. H. Syhre
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  6. R. Voigtmann
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, D-4400, Münster, Fed. Rep. of Germany

    A. Benninghoven

  2. Physical Institute of the Technical University, H-1111, Budapest, Hungary

    J. Giber  & J. László  & 

  3. Department of Physical Chemistry and Radiology, Eötvös University, H-1111, Budapest, Hungary

    M. Riedel

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1982 Springer-Verlag Berlin Heidelberg

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Bedrich, W., Koch, B., Mai, H., Seidenkranz, U., Syhre, H., Voigtmann, R. (1982). Distortion of Secondary Ion Extraction Due to Sample Surface Irregularities. In: Benninghoven, A., Giber, J., László, J., Riedel, M., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS III. Springer Series in Chemical Physics, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-88152-7_13

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  • DOI: https://doi.org/10.1007/978-3-642-88152-7_13

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-88154-1

  • Online ISBN: 978-3-642-88152-7

  • eBook Packages: Springer Book Archive

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