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Pulsed Laser- Plasma Deposition of Thin Films, and Film Structures

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Laser-Assisted Microtechnology

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 19))

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Abstract

The pulsed laser-plasma method is a novel, fast-developing technique for the synthesis of polycomponent thin-film materials and structures [8.1-6].

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Authors and Affiliations

  1. BIAS Bremen Institute of Applied Beam Technology, Klagenfurter Str. 2, D-28359, Bremen, Germany

    Professor Dr. Simeon M. Metev

  2. IFMO Institute of Fine Mechanics and Optics, Sablinskaya 14, 197101, St. Petersburg, Russia

    Professor Dr. Vadim P. Veiko

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  1. Professor Dr. Simeon M. Metev
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  2. Professor Dr. Vadim P. Veiko
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Metev, S.M., Veiko, V.P. (1998). Pulsed Laser- Plasma Deposition of Thin Films, and Film Structures. In: Laser-Assisted Microtechnology. Springer Series in Materials Science, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-87271-6_8

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  • DOI: https://doi.org/10.1007/978-3-642-87271-6_8

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-87273-0

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