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Pulsed Laser- Plasma Deposition of Thin Films, and Film Structures

  • Simeon M. Metev
  • Vadim P. Veiko
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 19)

Abstract

The pulsed laser-plasma method is a novel, fast-developing technique for the synthesis of polycomponent thin-film materials and structures [8.1-6].

Keywords

Substrate Temperature Schottky Barrier Film Property Vapour Flux Plasma Particle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1998

Authors and Affiliations

  • Simeon M. Metev
    • 1
  • Vadim P. Veiko
    • 2
  1. 1.BIAS Bremen Institute of Applied Beam TechnologyBremenGermany
  2. 2.IFMO Institute of Fine Mechanics and OpticsSt. PetersburgRussia

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