Pulsed Laser- Plasma Deposition of Thin Films, and Film Structures

  • Simeon M. Metev
  • Vadim P. Veiko
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 19)

Abstract

The pulsed laser-plasma method is a novel, fast-developing technique for the synthesis of polycomponent thin-film materials and structures [8.1-6].

Keywords

Titanium Crystallization GaAs Expense Dition 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1998

Authors and Affiliations

  • Simeon M. Metev
    • 1
  • Vadim P. Veiko
    • 2
  1. 1.BIAS Bremen Institute of Applied Beam TechnologyBremenGermany
  2. 2.IFMO Institute of Fine Mechanics and OpticsSt. PetersburgRussia

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