Skip to main content
SpringerLink
Log in

Laser Micromachining of Thin Films

  • Chapter
Laser-Assisted Microtechnology

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 19))

  • 187 Accesses

Abstract

The laser-induced treatment is a physical way for changing material properties. Character and extent of the laser action are determined first of all by the radiation-flux density. At the same time it is possible to change the dimensions, shape, and electrical and optical parameters of the thin-film elements not only by direct removal of film material, but also by thermal and thermo-chemical treatment (Chap.7). An important requirement in film treatment is that laser radiation be concentrated into a zone of strictly determined shape and boundaries. This can be satisfied by two principal conditions: the use of pulsed-laser radiation and of a projection-optical set-up for the formation of the zone of interaction.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. M. V.Allmen, A. Blatter: Laser Beam Interactions moth Materials ,2nd edn., Springer Ser. Mater. Sci., Vol.2 (Springer, Berlin, Heidelberg 1998)

    Google Scholar 

  2. M. N. Libenson: Fizika i Khimiya Obrabotki Materialov. No.2, 3 (1968)

    Google Scholar 

  3. G.V. Rosenberg: Optics of Thin-Film Coatings (in Russian) (Fismatgis, Moscow 1958)

    Google Scholar 

  4. V.C. Paek, A. Kestenbaum: J. Appl. Phys. 44, 2260(1983)

    Article  Google Scholar 

  5. M.N. Libenson, M.N. Nikitin: Fizika i Khimiya Obrabotki Materialov. No.5, 9 (1970)

    Google Scholar 

  6. G.L. Gurevitch, V. A. Murav’ev: Fizika i Khimiya Obrabotki Materialov. No.3, 5 (1973)

    Google Scholar 

  7. S. Nakayama, V. Saito, U. Takamoto: Bull. Jpn. Soc. Prec. Eng. 5, 39 (1971)

    Google Scholar 

  8. M.O. Aboel Fotoh, R.S. von Gutfeld: J. Appl. Phys. 43, 3789(1972)

    Article  Google Scholar 

  9. V.P. Veiko, M.N. Libenson: Laser Treatment (in Russian) (Lenizdat, Leningrad 1973)

    Google Scholar 

  10. E.B. Yakovlev: Kvant. Elektr. No.5, 1073 (1981) [Engl. transl.: Sov. J. Quant. Electr. 11,637(1981)]

    Google Scholar 

  11. G.R. Levinson, V.I. Smilga: Kvant. Elektr. 3, 1637 (1976) [Engl. transl.: Sov. J. Quant. Electr. 6, 885(1976)]

    Google Scholar 

  12. D. Bäuerle: Laser Processing and Chemistry (Springer, Berlin, Heidelberg 1996)

    Google Scholar 

  13. M.N. Libenson, G.S. Romanov, A.A. Imas: Zh. Eksper. Teor. Fiz. 54, 116(1968) [Engl. transl.: Sov. Phys. JETP27, 72 (1968)]

    Google Scholar 

  14. G.R. Levinson, V.I. Smilga: Kvant. Elektr. No.3, 72(1973)[Engl, transl.: Sov. J. Quant. Electr. 3,220(1973)]

    Article  Google Scholar 

  15. V.P. Veiko, Ya.A. Imas, A.N. Kokora, M.N. Libenson: Zh. Tekh. Fiz. 37, 1920 (1967)[Engl, transl.: Sov. Phys. Tech. Phys. 12, 1312(1967)]

    Google Scholar 

  16. S. Nakayama, V. Saito, U. Takamoto: Bull. Jpn. Soc. Prec. Eng. 5, 39 (1971)

    Google Scholar 

  17. M.O. Aboel Fotoh, R.S. von Gutfeld: J. Appl. Phys. 43, 3789(1972)

    Article  Google Scholar 

  18. R. Sard, D. Maydan: J. Appl. Phys. 42, 5084 (1971)

    Article  Google Scholar 

  19. M.S. Cohen, B.H. Unger, S.F. Milkoski: Bell Syst. Tech. J. 47, 385(1968)

    Google Scholar 

  20. V.P. Veiko, S.M. Metev, K.V. Stamenov, Kh.A. Kalev, S.M. Karpman: J. Phys. D13, 1571(1980)

    Google Scholar 

  21. V.P. Veiko, Kh.A. Kalev, S.M. Metev, K.V. Stamenov, B.M. Yurkevitch: In Lasers and Their Applications ,Proc. 3rd. Int’l Conf., Dresden (1977) p. 297

    Google Scholar 

  22. V.P. Veiko, S.M. Metev, A.I. Kaidanov, M.N. Libenson, E.B. Yakovlev: J. Phys. D 13, 1565(1980)

    Article  CAS  Google Scholar 

  23. V.P. Veiko, A. I. Kaidanov, E.B. Yakovlev: Kvant. Elektr. 7, 34 (1980) [Engl. transl.: Sov. J. Quant. Electr. 10, 17(1980)]

    CAS  Google Scholar 

  24. L.N. Landau, E.M. Lifshitz: Statistical Physics (in Russian) (Nauka, Moscow 1976) p. 118

    Google Scholar 

  25. H. Schlichting: Boundary Layer Theory (McGraw-Hill, New York 1979)

    Google Scholar 

  26. V.P. Veiko, S.M. Metv, A.I. Kaidanov, M.N. Libenson, E.B. Yakovlev: J. Phys. D13, 1565(1980)

    Google Scholar 

  27. L.E. Murr, R.T. Payne: J. Appl. Phys. 44, 1722(1973)

    Article  CAS  Google Scholar 

  28. S.M. Metev, V.P. Veiko, K.V. Stamenov, Kh.A. Kalev: Sov. J. Quant. Electr. 7, 863(1977)

    Article  Google Scholar 

  29. A. V. Likov: Heat Conduction Theory (in Russian) (Visha Shkola, Moscow 1967)

    Google Scholar 

  30. V. P. Veiko, I. M. Karpman, M.N. Libenson, E.B. Yakovlev: Kvant. Elektr. 9, 2167 (1982) [Engl. transl.: Sov. J. Quant. Electr. 12, 1922(1982)]

    CAS  Google Scholar 

  31. G. Parcus: Unestablished Thermal Stresses (in Russian) (Fizmatgiz, Moscow 1963)

    Google Scholar 

  32. V.P. Veiko: Laser Treatment of Thin-Film Elements (in Russian) (Mashinostroenie, Leningrad 1986)

    Google Scholar 

  33. H.S. Carslaw, J. C. Jaeger: Conduction of Heat in Solids (Oxford Univ. Press, London, New York 1959)

    Google Scholar 

  34. V.P. Veiko, E. A. Tuchkova, B.M. Yurkevitch: Fizikai Khimiya Obrabotki Materi-alov.No.3, 21(1982)

    Google Scholar 

  35. V. S. Sergeev, I. N. Vojshenin: Integral Hibrid Microcircuits (in Russian) (Sov. Radio, Moscow 1973)

    Google Scholar 

  36. A.G. Smagin, M.I. Yaroslavskij: Piezoelectricity of Quartz and Quartz Resonators (in Russian) (Energiya, Moscow 1970)

    Google Scholar 

  37. M.F. Stel’makh (ed.): Lasers in Technology (in Russian) (Energiya, Moscow 1975)

    Google Scholar 

  38. M. Novitzki: Lasers in Electronic Technology and Materials Treatment (in Russian) (Mashinostroenie, Moscow 1981)

    Google Scholar 

  39. V.N. Markovskij, R. A. Taipov: Lasers in Thin-Film Microcircuit Technology (in Russian) (Znanie, Leningrad 1968)

    Google Scholar 

  40. M.N. Libenson, V.P. Veiko, B.N. Montvillo: Voprosi Radioelektroniki Series 3, No. 8, 92(1965)

    Google Scholar 

  41. V. P. Sakharov, R.A. Kostanjan, V. V. Lossev: ElektronnayaTekhnikaSer.3-MikroelektronikaNo.6, 49(1972)

    Google Scholar 

  42. R.L. Waters, M.J. Weiner: Solid State Technol. No.4, 43 (1970)

    Google Scholar 

  43. A.G. Albin, E.S. Swenson: IEEE Trans. PHPR-8, 14(1972)

    Google Scholar 

  44. G. A. Bulger: Proc. 25-th Electronic Components Conf. (1975) p. 286

    Google Scholar 

  45. R. Dow, T. Richardson, E. Swenson: IEEE Trans. CHMT-1, 392 (1978)

    Google Scholar 

  46. D. Bäuerle: Chemical Processing with Lasers ,Springer Ser. Mater. Sci., Vol.1 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  47. D. Bäuerle: Laser Processing and Chemistry (Springer, Berlin, Heidelberg 1996)

    Google Scholar 

  48. K.R. Bube: Am. Ceram. Soc. Bull. 54, 528 (1975)

    CAS  Google Scholar 

  49. M. Oakes: Optical Engineering 17, 93 (1978)

    Google Scholar 

  50. R.C. Headley, M.S. Popowich, F.S. Anders: Electronics 46, 121 (1973)

    Google Scholar 

  51. A. Kestenbaum, T. Baer: IEEE Trans. CHMT-3, 637 (1980)

    Google Scholar 

  52. V. P. Veiko: Experience on Laser Treatment of Thin Films in Microelectronics (in Russian) (LDNTP, Leningrad 1977)

    Google Scholar 

  53. R.A. Taipov: Trudi LITMO. VoprossiKvant. Elektr. No.65, 44(1968)

    Google Scholar 

  54. S.I. Ling, R.D. Morison: Electron. Eng. 26, 25 (1967)

    Google Scholar 

  55. V.P. Zakharov, Yu.A. Tsvirko, V.N. Tchugaev: Dokl. Akad. Nauk. SSSR 170, 1056 (1966) [Engl, transl.: Sov. Phys.-Dokl. 10, 933 (1966)]

    CAS  Google Scholar 

  56. L. I. Gljukman: Piezoelectric Quartz Resonators (in Russian) (Energiya, Leningrad 1969)

    Google Scholar 

  57. S. Hocanson, B. Unger: J. Appl. Phys. 40, 3157(1969)

    Article  Google Scholar 

  58. V.P. Veiko, B. M. Yurgevitch: Quartz Resonators Frequecy Trimming by Laser Rad iation (in Russian) (LDNTP, Leningrad 1974)

    Google Scholar 

  59. V.A. Mostjaev, B.M. Kulikov: Elektronnaya Tekhnika Ser.9-Radiokomponenti, No.3,27(1969)

    Google Scholar 

  60. L.A. Bojarskaja, V. P. Veiko, V. A. Mostjaevetal: ElektronnayaTekhnika, Ser.5-Radiodetali i Radiokomponenti No.2, 85 (1976)

    Google Scholar 

  61. Patent U.S.A., No. 4, 131,484(1978)

    Google Scholar 

  62. I. M. Karpman, M.N. Libenson, E.B. Yakovlev: Laser Thermolithography in the Production of Integral Circuits (in Russian) (Znanie, Leningrad 1981)

    Google Scholar 

  63. D.F. Sheahan, R. A. Johnson: IEEE Trans. Circuits and Syst. CAS22, 69(1975)

    Article  Google Scholar 

  64. V.P. Veiko, B.M. Yurkevitch, I.N. Yukhno: Elektronnaya Tekhnika, Ser.5 -Radiodetali i Radiokomponenti No.2, 69 (1977)

    Google Scholar 

  65. O.G. Verbitzkij, E.A. Koshkarev, A.A. Lenchevskij, V.Ya. Barzhin: Elektronnaya Tekhnika, Ser.5 -Radiodetali i Radiokomponenti No.2, 89 (1974)

    Google Scholar 

  66. O.G. Verbitzkij, A.A. Lentchevskij, Yu.M. Ugrjumov: Elektronnaya Tekhnika, Ser.5 -Radiodetali i Radiokomponenti No.3, 50 (1977)

    Google Scholar 

  67. Electronic Engineering Juli, 53 (1977)

    Google Scholar 

  68. L.F. Pittroff, F.A. Ruegg: IEEEIntercon. Tech. Pap. Solid-StateNo.6, 43 (1973)

    Google Scholar 

  69. D. Abenaim: Microelectronics 5, 33 (1973)

    Google Scholar 

  70. V.P. Veiko, G.A. Kotov, M.N. Libenson, E.B. Yakovlev: In Physics of Optical Radiation Interaction with Condensed Matter (in Russian), Proc. Semin., Moscow, USSR, 1974 (Nauka, Moscow 1974), p. 27

    Google Scholar 

  71. I.M. Karpman, G.P. Suslov: Elektronnaya Tekhnika, Ser.3 -Mikroelektronika, No.4, 101(1975)

    Google Scholar 

  72. I.M. Karpman, B.N. Kotletzov, V.A. No.vojilov, S.A Saburov: Elektronnaya Promishlenost No.6, 41 (1975)

    Google Scholar 

  73. S. Metev: Physico-chemikal basis of laser lithography. Physical Processes in Laser-Materials Interactions ,ed. by M. Bertolotti (Plenum, New York 1983)

    Google Scholar 

  74. M.G. Cohen, R.A. Kaplan: Proc. IEEE70, 545(1982)

    Google Scholar 

  75. I.M. Karpman, M.N. Libenson, G.P. Suslov, E.N. Shpuntova: Repare of photomasks by laser radiation. Problems and Trends of Using Optico-Mechanical Methods in Microcircuit Production Technology (in Russian), Proc. Seminar, Leningrad, USSR, 1973 (Znanie, Leningrad 1973)

    Google Scholar 

  76. J.A. Fedotov, H. Pohl: Fotografie und Optik (Technika, Berlin and Sov. Radio, Moscow 1974)

    Google Scholar 

  77. V.P. Veiko, B.N. Kotletzov, M.N. Libenson: Laser Lithography (in Russian) (Znanie, Leningrad 1971)p.52

    Google Scholar 

  78. V.P. Veiko, S.M. Metev: Laser technology in Microelectronics (in Russian) (Academic, Sofia 1991) p. 117

    Google Scholar 

  79. G.B. Bubjakin, G.R. Levinson, A.N. Sviridov, V.l. Smilga, V. Tichinski: Tech nological Applications of Gas Lasers (in Russian) (Znanie, Leningrad 1970)

    Google Scholar 

  80. W. Weick: IEEEJ. QE-8, 126(1972)

    Article  CAS  Google Scholar 

  81. M.A. Saifi: IEEE J. QE-12, 120(1976)

    Article  Google Scholar 

  82. V.P. Veiko, B.M. Yurkevitch, G.A. Kotov: Izvestiya VUZ, Priborostroenie No. 10, 93 (1983)

    Google Scholar 

  83. G.P. Suslov, S.A. Saburov: Elektronnaya Tekhnika, Ser.3 -Mikroelektronika, No.4, 64(1976)

    Google Scholar 

  84. R.A. Bartolini: Proc. IEEE70, 589(1982)

    Article  Google Scholar 

  85. E.A. Vologdin: Tekhnikai Sredstva Svyasi, Ser. TRPANo.2, 5(1979)

    Google Scholar 

  86. P. Kivits, B. Jakobs, P. Zahm: J. Vac. Sci. Technol. 18, 68(1981)

    Article  Google Scholar 

  87. Yu.I. Kuklev, G.A. Machulka: Kvantovaya Elektronika No.6, 86(1971)

    Google Scholar 

  88. M. Kogelnik: In Lasers ,ed. by A.K. Levin, Vol. l(Dekker, New York 1968)

    Google Scholar 

  89. N.N. Evtikhijev, G.R. Levinson, K.P. Tzvetajev, O.V. Golocnoj: Kvant. Elektr. 1, 959 (1974) [Engl. transl.: Sov. J. Quant. Electr. 4, 527 (1974)]

    Google Scholar 

  90. A.E. Bell, F.W. Spong: IEEE J. QE-14, 487(1978)

    Article  Google Scholar 

  91. V.P. Veiko, I.M. Karpman, M.N. Libenson, E.B. Yakovlev: Kvant. Elektr. 9, 2167 (1982) [Engl, transl.: Sov. J. Quant. Electr. 12, 2063 (1982)]

    CAS  Google Scholar 

  92. R.A. Bartolini, H.A. Weakliem, B.F. Williams: Opt. Eng. 15, 99(1976)

    CAS  Google Scholar 

  93. V.N. Selesnev, N.N. Shujkin: Kvant. Elektr. 1, 1485 (1974) [Engl, transl.: Sov. J. Quant. Electr. 4, 819(1974)]

    Google Scholar 

  94. L.B. Schein: Electrophotography and Development Physics ,2nd edn., Springer Ser. Electrophys., Vol. 14 (Springer, Berlin, Heidelberg 1992)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. BIAS Bremen Institute of Applied Beam Technology, Klagenfurter Str. 2, D-28359, Bremen, Germany

    Professor Dr. Simeon M. Metev

  2. IFMO Institute of Fine Mechanics and Optics, Sablinskaya 14, 197101, St. Petersburg, Russia

    Professor Dr. Vadim P. Veiko

Authors
  1. Professor Dr. Simeon M. Metev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Professor Dr. Vadim P. Veiko
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

Copyright information

© 1998 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Metev, S.M., Veiko, V.P. (1998). Laser Micromachining of Thin Films. In: Laser-Assisted Microtechnology. Springer Series in Materials Science, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-87271-6_3

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-87271-6_3

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-87273-0

  • Online ISBN: 978-3-642-87271-6

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation