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Laser- Based Equipment for Microtechnology

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Laser-Assisted Microtechnology

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 19))

Abstract

The role of the technical equipment in laser microtechnology is to perform a controllable action of the laser radiation on the material to be treated. It initiates a concrete technological process in areas of precisely controllable shape and size. The laser is the main unit of the equipment and its characteristics determine, to a great extent, the qualitative and quantitative parameters of the technological treatment.

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Authors and Affiliations

  1. BIAS Bremen Institute of Applied Beam Technology, Klagenfurter Str. 2, D-28359, Bremen, Germany

    Professor Dr. Simeon M. Metev

  2. IFMO Institute of Fine Mechanics and Optics, Sablinskaya 14, 197101, St. Petersburg, Russia

    Professor Dr. Vadim P. Veiko

Authors
  1. Professor Dr. Simeon M. Metev
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  2. Professor Dr. Vadim P. Veiko
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© 1998 Springer-Verlag Berlin Heidelberg

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Metev, S.M., Veiko, V.P. (1998). Laser- Based Equipment for Microtechnology. In: Laser-Assisted Microtechnology. Springer Series in Materials Science, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-87271-6_2

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  • DOI: https://doi.org/10.1007/978-3-642-87271-6_2

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-87273-0

  • Online ISBN: 978-3-642-87271-6

  • eBook Packages: Springer Book Archive

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