• Simeon M. Metev
  • Vadim P. Veiko
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 19)


Laser microtechnology is a combination of laser-assisted technological processes for precise treatment, modification and synthesis of materials in the domain of micrometer sizes. This specific area of laser technology has found its most effective application in precisition microprocessing of small passive and active elements and components of microelectronics, optics, optoelectronics and micromechanics. In many cases its advantage results from the relatively low cost of the technological equipment, and from the high efficiency and unique capabilities of the laser-assisted technological methods.


Lithographic Technique Optical Lithography Quartz Resonator Film Treatment Optical Tool 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1998

Authors and Affiliations

  • Simeon M. Metev
    • 1
  • Vadim P. Veiko
    • 2
  1. 1.BIAS Bremen Institute of Applied Beam TechnologyBremenGermany
  2. 2.IFMO Institute of Fine Mechanics and OpticsSt. PetersburgRussia

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