Introduction

  • Simeon M. Metev
  • Vadim P. Veiko
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 19)

Abstract

Laser microtechnology is a combination of laser-assisted technological processes for precise treatment, modification and synthesis of materials in the domain of micrometer sizes. This specific area of laser technology has found its most effective application in precisition microprocessing of small passive and active elements and components of microelectronics, optics, optoelectronics and micromechanics. In many cases its advantage results from the relatively low cost of the technological equipment, and from the high efficiency and unique capabilities of the laser-assisted technological methods.

Keywords

Quartz Microwave Drilling Trench Dura 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1998

Authors and Affiliations

  • Simeon M. Metev
    • 1
  • Vadim P. Veiko
    • 2
  1. 1.BIAS Bremen Institute of Applied Beam TechnologyBremenGermany
  2. 2.IFMO Institute of Fine Mechanics and OpticsSt. PetersburgRussia

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