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Quantitative Aspects of Quter-Shell Excitation in Ion-Surface Collisions

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Inelastic Particle-Surface Collisions

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 17))

Abstract

Outer-shell excitation of sputtered atoms is a well-known inelastic process in ion-solid collisions. Quantities that are readily measurable in this process are the photon yields and the velocities (or energies) of the excited atoms. Useful information on possible basic mechanisms responsible for excitation can be derived from such quantitative data. In this report, the experimental procedures used to perform these measurements are described and the results relevant to the understanding of the excitation process in sputtering are discussed in detail.

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Author information

Authors and Affiliations

  1. Materials Research Laboratory, The Pennsylvania State University, University Park, PA, 16802, USA

    I. S. T. Tsong

Authors
  1. I. S. T. Tsong
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Editor information

Editors and Affiliations

  1. Max-Planck-Institut für Plasmaphysik, D-8046, Garching bei München, Fed. Rep. of Germany

    Edmund Taglauer

  2. Fachbereich 4 der Universität Osnabrück, D-4500, Osnabrück, Fed. Rep. of Germany

    Werner Heiland

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© 1981 Springer-Verlag Berlin Heidelberg

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Tsong, I.S.T. (1981). Quantitative Aspects of Quter-Shell Excitation in Ion-Surface Collisions. In: Taglauer, E., Heiland, W. (eds) Inelastic Particle-Surface Collisions. Springer Series in Chemical Physics, vol 17. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-87065-1_19

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  • DOI: https://doi.org/10.1007/978-3-642-87065-1_19

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-87067-5

  • Online ISBN: 978-3-642-87065-1

  • eBook Packages: Springer Book Archive

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