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Geometrical Analysis of Mask Pattern for VLSI and its Application

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Computer Graphics

Abstract

An original definition is presented of four distances between two segments at any angle that are not uniquely-defined in plane geometry. A systematic method for generation of proper shapes for near-by regions within a fixed distance between segment sequences is also presented. These are indispensable for the checking of layout design rules pertaining to mask pattern data including diagonal edges.

Using this geometrical analysis, we have developed a high performance pattern checker, MACH (Mask Artwork CHecking program), that can detect all design rule errors and visualize them on a color graphic terminal. MACH performs well in VLSI pattern checking. This program has been applied to more than one hundred LSIs since April 1981.

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References

  1. P. Wilcox, H. Rombeek, and D. M. Caughey, “Design Rule Verification Based on One Dimensional Scans”, Proc. of the 15th DA Conf., June 1978, pp. 285–289.

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  2. D. Alexander, “A Technology Independent Design Rule Checker”, 3rd USA-JAPAN Computer Conf., 1978, pp. 412–416.

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  3. C. R. McCaw, “Unified Shapes Checker — A Checking Tool for LSI”, Proc. of the 16th DA Conf., June 1979, pp. 81–87.

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  4. T. Kozawa, A. Tsukizoe, J. Sakemi, C. Miura, and T. Ishii, “A Concurrent Pattern Operation Algorithm for VLSI Mask Data”, Proc. of the 18th DA Conf., June 1981, pp. 563–570.

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Author information

Authors and Affiliations

  1. Central Research Laboratory, Hitachi Ltd., Higashi Koigakubo, Kokubunji, Tokyo 185, Japan

    A. Tsukizoe, J. Sakemi & T. Kozawa

Authors
  1. A. Tsukizoe
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  2. J. Sakemi
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  3. T. Kozawa
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Editor information

Editors and Affiliations

  1. Kunii Laboratory of Computer Science, Department of Information Science, Faculty of Science, The University of Tokyo, Japan

    Tosiyasu L. Kunii (Professor & Director) (Professor & Director)

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© 1983 Springer-Verlag Tokyo

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Tsukizoe, A., Sakemi, J., Kozawa, T. (1983). Geometrical Analysis of Mask Pattern for VLSI and its Application. In: Kunii, T.L. (eds) Computer Graphics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-85962-5_14

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  • DOI: https://doi.org/10.1007/978-3-642-85962-5_14

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-85964-9

  • Online ISBN: 978-3-642-85962-5

  • eBook Packages: Springer Book Archive

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