Abstract
The use of low energy ion scattering and secondary ion mass spectrometry for the compositional and structural analysis of the top few monolayers of a surface is reviewed. Experimental results for scattering, sputtering and recoiling from clean and adsorbate covered Ni and Ni3 Al surfaces are used to illustrate the importance of charge exchange processes for quantitative composition analysis and the role of shadowing and blocking in structural analysis.
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© 1993 Springer-Verlag Berlin Heidelberg
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MacDonald, R.J., O’Connor, D.J., King, B.V. (1993). Studies of Surface Composition and Structure Using Low-Energy Ion Scattering and SIMS. In: Howe, R.F., Lamb, R.N., Wandelt, K. (eds) Surface Science. Springer Proceedings in Physics, vol 73. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84933-6_3
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