Preparation and Patterning of (110) Oriented YBaCuO Thin Films
Epitaxial YBaCuO films with (110) orientation (c-axis in plane) were made by laser deposition and magnetron sputtering and characterized by X-ray and optical methods. Problems associated with patterning of these films are discussed and solutions to these problems are presented. Measurements of transport properties along c-axis, and along ab planes, on the patterned films, showed a pronounced anisotropy.
KeywordsFilm Plane Pronounced Anisotropy Typical Single Crystal Standard Photolithographic Process YBaCuO Film
Unable to display preview. Download preview PDF.