Preparation and Patterning of (110) Oriented YBaCuO Thin Films

  • B. Elkin
  • H.-U. Habermeier
  • B. Leibold
  • D. Shen
Conference paper
Part of the Springer Series in Solid-State Sciences book series (SSSOL, volume 113)


Epitaxial YBaCuO films with (110) orientation (c-axis in plane) were made by laser deposition and magnetron sputtering and characterized by X-ray and optical methods. Problems associated with patterning of these films are discussed and solutions to these problems are presented. Measurements of transport properties along c-axis, and along ab planes, on the patterned films, showed a pronounced anisotropy.


Film Plane Pronounced Anisotropy Typical Single Crystal Standard Photolithographic Process YBaCuO Film 
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Copyright information

© Springer-Verlag Berlin, Heidelberg 1993

Authors and Affiliations

  • B. Elkin
    • 2
  • H.-U. Habermeier
    • 1
  • B. Leibold
    • 1
  • D. Shen
    • 1
  1. 1.A.F. Ioffe Physico-Technical InstituteSt. PetersburgRussia
  2. 2.Max-Planck-Institut für FestkörperforschungStuttgart 80Fed. Rep. of Germany

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