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Hydrogen and the Mechanical Properties of Semiconductors

  • Stephen J. Pearton
  • James W. Corbett
  • Michael Stavola
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 16)

Abstract

As was initially mentioned in Chap. 2, the effect of hydrogen on the mechanical properties of materials is an important area of research. While most of this work has involved the study of hydrogen embrittlement of metals [12.1,2], similar phenomena can occur in crystalline semiconductors. In this chapter we discuss some of these embrittlement effect and the defects which may be the cause of such problems.

Keywords

Electron Paramagnetic Resonance Hydrogen Embrittlement Vacancy Cluster Dangling Bond Silicon Lattice 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • Stephen J. Pearton
    • 1
  • James W. Corbett
    • 2
  • Michael Stavola
    • 3
  1. 1.AT&T Bell LaboratoriesMurray HillUSA
  2. 2.Physics DepartmentState University of New York at AlbanyAlbanyUSA
  3. 3.Physics DepartmentLehigh UniversityBethlehemUSA

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