Preparation and Electrical Properties of Plasma Polymer Metal Composite Films

  • A. Heilmann
  • C. Hamann
Conference paper
Part of the Springer Series in Solid-State Sciences book series (SSSOL, volume 107)

Abstract

Plasma polymer metal composite films were prepared by simultaneous plasma polymerization and metal evaporation. The metal (Ag, Au, Cu) or semiconductor (Ge, Sn) cluster were encapsulated inside the polymer matrix as microcrystallites or as amorphous material. At metal filling factors lower than the percolation threshold thermal activated tunnelling between the metal particles was found as the dominant conducting mechanism. During annealing processes the electrical conductivity substantially decreases due to changes of the metal particle size and particle shape by coalescence.

Keywords

Benzene HMDS 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    E. Kay: Z. Phys. D 3, 251 (1987)ADSCrossRefGoogle Scholar
  2. 2.
    J. Perrin, D. Despax, V. Hanchett, E. Kay: J. Vac. Sei. Technol. A 4, 46 (1986)ADSCrossRefGoogle Scholar
  3. 3.
    L. Martinu, H. Biederman: Plasm. Chem. Plasm. Proc. 5, 81 (1985)CrossRefGoogle Scholar
  4. 4.
    H. Suhr, A. Etspüler, E. Feurer, C. Oehr: Plasm. Chem. Plasm. Proc. 8, 9 (1988)CrossRefGoogle Scholar
  5. 5.
    K. Kashiwagi, Y. Yoshida, Y. Murayama: J. Vac. Sei. Technol. A 5, 1828 (1987)ADSCrossRefGoogle Scholar
  6. 6.
    A. Heilmann, C. Hamann, G. Kampfrath, V. Kopfe: Vacuum 41, 1472 (1990)CrossRefGoogle Scholar
  7. 7.
    J.E. Morris, T.J. Coutts: Thin Solid Films 47, 3 (1977)ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • A. Heilmann
    • 1
  • C. Hamann
    • 1
  1. 1.University of Technology ChemnitzDepartment of PhysicsChemnitzGermany

Personalised recommendations