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Precision Aspheric Generators for Off-axis X-ray Mirrors and Asymmetric Aspheric Lenses

  • Shigeo Moriyama
Conference paper

Summary

This paper describes two types of newly developed precision aspheric generators. One is a fly cutting type machine for fabricating off-axis X-Ray metal mirrors. While the cutting spindle is rotating, the cutting depth can be dynamically controlled according to programmed data synchronized with the current rotation angle of the spindle. A figure accuracy of 0. 1 μ m and a surface roughness of 0.03 μ m Rmax are achieved. Aspheric mirrors fabricated using this machine were built in an X-ray microscope, and demonstrated a 2 μ m resolution. The other newly developed aspheric generator is for fabricating nonaxissymmetric aspheric glass lenses used in laser beam printers. Pairs of glass blanks are set around a turntable which rotates at about 4 rpm. The surfaces of the blanks are machined with a grinding wheel, where the grinding depth is dynamically controlled. The typical machining time for a lens is 30 minutes. A figure accuracy of 0. 2 μ m and a surface roughness of 0.05 μ m Rmax are achieved.

Keywords

Rotational Error Piezo Actuator Aspheric Lens Straightness Error Error Compensation System 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    S. Moriyama et al.; Development of a precision diamond cutting machine of asymmetric aspheric mirrors. Proceedings of SPIE, Vol 830 (1987) 98.Google Scholar
  2. 2.
    Y. Suzuki et al.; X-ray microprobe with a pair of elliptical mirrors. Japanese Journal of applied Physics, Vol 28, 9 (1989) 1660.CrossRefGoogle Scholar
  3. 3.
    Akira Arimoto et al.; High resolution laser scanning system using an F-θ lens with a rotationally asymmmetrical aspheric surface. Tech. Digest of 1988 Conf. on Lasers and Electro-optics, WM48, (1988).Google Scholar
  4. 4.
    S. Moriyama et al.; Fabrication of nonaxissymmetric aspheric lenses for laser printers. Proccedings of SPIE, Vol 1167 (1989) 219.Google Scholar

Copyright information

© Springer-Verlag Berlin, Heidelberg 1991

Authors and Affiliations

  • Shigeo Moriyama
    • 1
  1. 1.Central Research LaboratoryHitachi Ltd.Kokubunji, Tokyo 185Japan

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