Precision Aspheric Generators for Off-axis X-ray Mirrors and Asymmetric Aspheric Lenses

  • Shigeo Moriyama
Conference paper

Summary

This paper describes two types of newly developed precision aspheric generators. One is a fly cutting type machine for fabricating off-axis X-Ray metal mirrors. While the cutting spindle is rotating, the cutting depth can be dynamically controlled according to programmed data synchronized with the current rotation angle of the spindle. A figure accuracy of 0. 1 μ m and a surface roughness of 0.03 μ m Rmax are achieved. Aspheric mirrors fabricated using this machine were built in an X-ray microscope, and demonstrated a 2 μ m resolution. The other newly developed aspheric generator is for fabricating nonaxissymmetric aspheric glass lenses used in laser beam printers. Pairs of glass blanks are set around a turntable which rotates at about 4 rpm. The surfaces of the blanks are machined with a grinding wheel, where the grinding depth is dynamically controlled. The typical machining time for a lens is 30 minutes. A figure accuracy of 0. 2 μ m and a surface roughness of 0.05 μ m Rmax are achieved.

Keywords

Torque Flange Grinding 

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References

  1. 1.
    S. Moriyama et al.; Development of a precision diamond cutting machine of asymmetric aspheric mirrors. Proceedings of SPIE, Vol 830 (1987) 98.Google Scholar
  2. 2.
    Y. Suzuki et al.; X-ray microprobe with a pair of elliptical mirrors. Japanese Journal of applied Physics, Vol 28, 9 (1989) 1660.CrossRefGoogle Scholar
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    Akira Arimoto et al.; High resolution laser scanning system using an F-θ lens with a rotationally asymmmetrical aspheric surface. Tech. Digest of 1988 Conf. on Lasers and Electro-optics, WM48, (1988).Google Scholar
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    S. Moriyama et al.; Fabrication of nonaxissymmetric aspheric lenses for laser printers. Proccedings of SPIE, Vol 1167 (1989) 219.Google Scholar

Copyright information

© Springer-Verlag Berlin, Heidelberg 1991

Authors and Affiliations

  • Shigeo Moriyama
    • 1
  1. 1.Central Research LaboratoryHitachi Ltd.Kokubunji, Tokyo 185Japan

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