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Electron Holography and Its Applications to Surface Observation

  • A. Tonomura
Conference paper
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 17)

Abstract

The phase distribution of an electron beam is now measurable to a precision of 1/100 of the wavelength by using both electron holography and a “coherent” field-emission electron beam. Holographic interference micrographs obtained in this way can display the thickness distribution of a thin film or the topography of a single-crystalline surface in atomic dimensions.

Keywords

Electron Beam Thickness Distribution Optical Reconstruction Object Wave Interference Microscopy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin, Heidelberg 1992

Authors and Affiliations

  • A. Tonomura
    • 1
  1. 1.Advanced Research LaboratoryHitachi, Ltd.Hatoyama, SaitamaJapan

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