Electron Holography and Its Applications to Surface Observation
The phase distribution of an electron beam is now measurable to a precision of 1/100 of the wavelength by using both electron holography and a “coherent” field-emission electron beam. Holographic interference micrographs obtained in this way can display the thickness distribution of a thin film or the topography of a single-crystalline surface in atomic dimensions.
KeywordsElectron Beam Thickness Distribution Optical Reconstruction Object Wave Interference Microscopy
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