ESD of Multiply Charged Ions from SiO2: A Search for Mechanisms

  • R. A. Baragiola
  • T. E. Madey
  • A.-M. Lanzillotto
Conference paper
Part of the Springer Series in Surface Sciences book series (SSSUR, volume 19)

Abstract

We report ESD of singly- and multiply-charged substrate species (Si+, Si2+, Si3+, O+, O2+, and SiO+) and adsorbed species (H+ and F+) from thermally grown SiO2 and from quartz. We have measured ion yields Y(E) and energy distribution curves (EDCs) for electron energies E between 100 and 5000 eV. Y(E) curves have onsets related to the Si2p and O1s thresholds, but do not follow core ionization cross sections. EDCs of Si ions are a few eV wide, while those of O+ and H+ have tails extending to >25 eV. The results suggest ESD is initiated by Auger decay from a core hole in the presence of additional electronic excitations.

Keywords

Quartz SiO2 Auger 

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Copyright information

© Springer-Verlag Berlin, Heidelberg 1990

Authors and Affiliations

  • R. A. Baragiola
    • 1
  • T. E. Madey
    • 1
  • A.-M. Lanzillotto
    • 2
  1. 1.Department of Physics and Astronomy and Laboratory for Surface ModificationRutgers UniversityPiscatawayUSA
  2. 2.David Sarnoff Research CenterPrincetonUSA

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