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Processes of Desorption and Desorption Cross Sections with Electrons at Silicon Surfaces

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Desorption Induced by Electronic Transitions DIET IV

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 19))

Abstract

Electron stimulated production of positive ions from water exposed silicon monocrystals (100) and (111) has been studied following adsorption, oxidation and electron irradiation. Measurements of desorption cross section are described for both H+ ions as well as the range of minority OH+ and O+ ions observed in the study. The decay of adsorbate signal is further compared with the reduction of the oxygen (KLL) Auger signal.

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References

  1. For example, T. E. Madey, D. E. Ramaker, and R. Stockbauer, Ann. Rev. Phys. Chem. 35, 215 (1984); E. M. Williams and J. L. de Segovia, Vacuum, 39, 633 (1989)

    Article  CAS  Google Scholar 

  2. M. L. Knotek, Rep. Prog. Phys. 47, 1499 (1984).

    Article  CAS  Google Scholar 

  3. S. L. Bennett and E. M. Williams, Vacuum, 38, 923 (1988).

    Article  CAS  Google Scholar 

  4. M. Q. Ding, E. M. Williams, J. P. Adrados, and J. L. de Segovia, Surf. Sci. Leu. 140, L264 (1984).

    CAS  Google Scholar 

  5. R. H. Stulen and P. A. Thiel, Surf. Sci. 157, 99 (1985).

    Article  CAS  Google Scholar 

  6. S. Ciraci and H. Wagner, Phys Rev B27, 5180 (1983); H. Ibach, H. Wagner and D. Bruchmann, Solid State Commun. 42, 457 (1982); Y. J. Chabal and S. B. Christman, Phys. Rev. B29, 6974 (1984)

    Google Scholar 

  7. J. A. Schaefer, J. Anderson, and G. J. Lapeyre, J. Vac. Sci. Technol. A3 1443 (1985); J. A. Schaefer, F. Stucki, D. J. Frankel, W. Goepel, and G. J. Lapeyre, J. Vac. Sci. Technol. B2, 359 (1984).

    Google Scholar 

  8. M. Q. Ding and E. M. Williams, Surf. Sci. 160,189 (1985).

    Article  CAS  Google Scholar 

  9. M. L. Knotek and P. J. Feibelman, Phys. Rev. Lett 40, 964 (1978); Surf. Sci. 90, 78 (1979)

    Article  CAS  Google Scholar 

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Author information

Authors and Affiliations

  1. Department of Electrical Engineering and Electronics, The University of Liverpool, P.O. Box 147, Liverpool, L693BX, UK

    S. L. Bennett & E. M. Williams

Authors
  1. S. L. Bennett
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  2. E. M. Williams
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Editor information

Editors and Affiliations

  1. Institut für Allgemeine Physik, Technische Universität, Wiedner Hauptstrasse 8-10, Wien, A-1040, Austria

    Gerhard Betz  & Peter Varga  & 

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© 1990 Springer-Verlag Berlin, Heidelberg

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Bennett, S.L., Williams, E.M. (1990). Processes of Desorption and Desorption Cross Sections with Electrons at Silicon Surfaces. In: Betz, G., Varga, P. (eds) Desorption Induced by Electronic Transitions DIET IV. Springer Series in Surface Sciences, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84145-3_29

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  • DOI: https://doi.org/10.1007/978-3-642-84145-3_29

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-84147-7

  • Online ISBN: 978-3-642-84145-3

  • eBook Packages: Springer Book Archive

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