Abstract
The possible role of desorption induced by electronic transition (DIET) in laser etching of silicon by chlorine is discussed, both in the case of the reaction of gas phase radicals at the Si surface (“photoreaction”) and in the case of the reaction of chemisorbed chlorine (“photodesorption”). While DIET seems to be excluded in the first case, the data are still inconclusive in the second case. Laser heating which cannot be avoided in the experiments performed to date blurs the signature of DIET. However, purely thermal models seem to fail to account for all the experimental data.
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References
R. Kullmer and D. Bäuerle, Appl. Phys. A 43, 227 (1987).
P. Mogyorosi, K. Piglmayer, R. Kullmer and D. Bäuerle, Appl. Phys. A 45, 293 (1988).
R. Kullmer and D. Bäuerle, Appl. Phys. A 47, 377 (1988).
Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase and H. Okano, Appl. Phys. A 44, 313 (1987).
J.V. Florio and W.D. Robertson, Surf. Sci 18, 398 (1969).
W. Sesselmann, E. Hudeczek and F. Bachmann, J. Vac. Sci. Technol. B, accepted.
T. Bailer, D. J. Oostra and A. E. de Vries, J. Appl. Phys. 60, 2321 (1986).
T. S. Baller, J. van Zwol, S. T. de Zwart, G. N. A. van Veen, H. Feil and J. Dieleman, MRS Symposium B, Boston (1988).
T.S. Baller, and J. Dieleman, Appl. Surf. Sci, in press.
G. Comsa and R. David, Surf. Sci. Rep. 5, 145 (1985).
Boulmer, B. Bourguignon, J.P. Budin and D. Débarre, Appl. Surf. Sci., in press.
J. Boulmer, B. Bourguignon, J.P. Budin and D. Débarre, Chemtronics, in press.
S. de Unamuno and E. Fogarassy, Appl. Surf. Sci. 36, 1 (1989).
J.T. Lin and T.F. George, J. Appl. Phys. 54, 382 (1983).
J.M. Hicks, L.E. Urbach, E.W. Plummer and H.L. Dai, Phys. Rev. Lett., 61, 2588 (1988).
R. B. Jackman, H. Ebert and J. S. Foord, Surf. Sci. 176, 183 (1986).
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© 1990 Springer-Verlag Berlin, Heidelberg
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Bourguignon, B., Boulmer, J., Budin, JP., Débarre, D. (1990). Do Electronic Transitions Play a Role in Laser Etching? The Case of Cl2 on Si(100). In: Betz, G., Varga, P. (eds) Desorption Induced by Electronic Transitions DIET IV. Springer Series in Surface Sciences, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84145-3_18
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DOI: https://doi.org/10.1007/978-3-642-84145-3_18
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