Skip to main content
SpringerLink
Log in

Summary and Conclusions

  • Chapter
Laser Processing of Thin Films and Microstructures

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 3))

  • 187 Accesses

Abstract

Previous chapters have described in detail the various mechanisms by which thin dielectric films can be formed and patterned by laser beams. In this chapter, we discuss and compare the growth rates and physical properties of these layers. Since laser processing can also be extended to semiconducting, conducting, and superconducting films, we also discuss and assess the potential applications of the technology to specific device-oriented fields.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. B.M. McWilliams, I.P. Herman, F. Mitlitsky, R.A. Hyde, L.L. Woods Appl. Phys. Lett. 43, 946 (1983)

    Article  ADS  Google Scholar 

  2. B.M. McWilliams: (private communication, and to be published)

    Google Scholar 

  3. G.G. Bentini, M. Berti, A.V. Drigo, E. Jannitti, C. Cohen, J. Siejka: In Laser Chemical Processing of Semiconductor Devices, ed. by F.A. Houle, T.F. Deutsch, R.M. Osgood (MRS, Pittsburgh 1984) p.126

    Google Scholar 

  4. E. Harari: J. Appl. Phys. 49, 2478 (1978)

    Article  ADS  Google Scholar 

  5. C.M. Osburn, D.W. Ormond: J. Electrochem. Soc. 119, 591 (1972)

    Article  Google Scholar 

  6. I.H. Pratt: Solid State Techn. 12, 49 (December 1969)

    Google Scholar 

  7. I.W. Boyd: J. Appl. Phys. 54, 3561 (1983)

    Article  ADS  Google Scholar 

  8. R.R. Krchnavek, H.H. Gilgen, R.M. Osgood: J. Vac. Sci. Techn. B 2, 641 (1984)

    Article  Google Scholar 

  9. T.E. Orlowski, H. Richter: Appl. Phys. Lett. 45, 241 (1984)

    Article  ADS  Google Scholar 

  10. K. Emery, L.R. Thompson, J.J. Rocca, G.J. Collins: SPIE 459, 82 (1984)

    Google Scholar 

  11. J. Nulman, J.P. Krusius, A. Gat: IEEE EDL-6, 205 (1985)

    Google Scholar 

  12. P.K. Boyer, G.A. Roche, W.H. Ritchie, G.J. Collins: Appl. Phys. Lett. 40, 716 (1982)

    Article  ADS  Google Scholar 

  13. P.K. Boyer, K.A. Emery, H. Zarnani, G. J. Collins: Appl. Phys. Lett. 45, 979 (1984)

    Article  ADS  Google Scholar 

  14. P.K. Boyer, C.A. Moore, R. Solanki, W.K. Ritchie, G.A. Roche, G.J. Collins: In Laser Diagnostics and Photochemical, Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (North-Holland, Amsterdam, 1983) p.119

    Google Scholar 

  15. I.W. Boyd, J.I.B. Wilson: Solid State Electr. 27, 209 (1984)

    Article  ADS  Google Scholar 

  16. A.M. Hodge, C. Pickering, A.J. Pidduck, R.W. Hardeman: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.313

    Google Scholar 

  17. C.M. Gronet, J.C. Sturm, K.E. Williams, J.F. Gibbons: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.305

    Google Scholar 

  18. J.C. Gelpey, P.O. Stump, R.A. Capodilupo: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.321

    Google Scholar 

  19. Z.A. Weinberg, T.N. Nguyen, S.A. Cohen, R. Kalish: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.327

    Google Scholar 

  20. J. Nulman, J.P. Krusius, N. Shah, A. Gat, A. Baldwin: J. Vac. Sci. Technol. A 4, 1005 (1986)

    Article  ADS  Google Scholar 

  21. N. Chan Tung, Y. Caratini, L. Liauzu: In Dielectric Layers in Semiconductors, ed. by G.G. Bentini, E. Fogarassy, A. Golanski (Les Editions de Physique, Les Ulis 1986) p.247

    Google Scholar 

  22. J.P. Ponpon, J.J. Grob, A. Grob, R. Stuck: J. Appl. Phys. 59, 3921 (1986)

    Article  ADS  Google Scholar 

  23. M.M. Moslehi, K.C. Saraswat, S.C. Shatas: Appl. Phys. Lett. 47, 1113 (1985)

    Article  ADS  Google Scholar 

  24. M.M. Moslehi, S.C. Shatas, K.C. Saraswat: Appl. Phys. Lett. 47, 1353 (1985)

    Article  ADS  Google Scholar 

  25. G.J. Fisanick, M.E. Gross, J.E. Hopkins, M.D. Fennell, K.J. Schnoes, A. Katzir: J. Appl. Phys. 57, 1139 (1985)

    Article  ADS  Google Scholar 

  26. M.E. Gross, A. Appelbaum, P.K. Gallagher: Appl. Phys. Lett. 61, 1628 (1987)

    Google Scholar 

  27. J. Bohandy, B.F. Kim, F.J. Adrian: J. Appl. Phys. 60, 1538 (1986)

    Article  ADS  Google Scholar 

  28. H. Sankur, J.T. Cheung: J. Vac. Sci. Technol. A1, 1806 (1983)

    ADS  Google Scholar 

  29. D.J. Ehrlich, R.M. Osgood, D.J. Silversmith, T.F. Deutsch: IEEE EDL-1, 101 (1980)

    Google Scholar 

  30. Y. Rytz-Froideveau, R.P. Salathè, H.H.Gilgen: Appl. Phys. A 37, 121 (1985)

    Article  ADS  Google Scholar 

  31. J.A. Yasaitis, G.H. Chapman, J.I. Raffel: IEEE EDL-3, 184 (1982)

    Google Scholar 

  32. J.Y. Tsao, D.J. Ehrlich, D.J. Silversmith, R.W. Mountain: IEEE EDL-3, 164 (1982)

    Google Scholar 

  33. J.G. Black, D.J. Ehrlich, M. Rothschild, S.P. Doran, J.H.C. Sedlacek: J. Vac. Sci. Technol. B 5, 419 (1987)

    Article  Google Scholar 

  34. D.J. Ehrlich, J.Y. Tsao, D.J. Silversmith, J.H. Sedlacek, R.W. Mountain, W.S. Graber: IEEE EDL-3, 164 (1984)

    Google Scholar 

  35. B.M. McWilliams, H.W. Chin, I.P. Herman, R.A. Hyde, F. Mitlitsky, J.C. Whitehead, L.L. Wood: SPIE 459, 49 (1984)

    Google Scholar 

  36. H. Zarnani, P.K. Boyer, M. Fathipour, C.W. Wilmsen, R. Solanki, G.J. Collins: In Laser Chemical Processing of Semiconductor Devices, ed. by F.A. Houle, T.F. Deutsch, R.M. Osgood (MRS, Pittsburgh 1984) p.122

    Google Scholar 

  37. B.E. Deal, A.S. Grove: J. Appl. Phys. 36, 3770 (1965)

    Article  ADS  Google Scholar 

  38. I.W. Boyd, J.I.B. Wilson: J. Appl. Phys. 53, 4166 (1982)

    Article  ADS  Google Scholar 

  39. I.W. Boyd, J.I.B. Wilson, J.L. West: Thin Solid Films 83, L173 (1981)

    Article  ADS  Google Scholar 

  40. S.A. Schafer, S.A. Lyon: J. Vac. Sci. Technol. 19, 494 (1981)

    Article  ADS  Google Scholar 

  41. C. Fiori: Phys. Rev. Lett. 52, 2077 (1984)

    Article  ADS  Google Scholar 

  42. Y. Mishima, M. Hirose, Y. Osaka, Y. Ashida: J. Appl. Phys. 55, 1234 (1984)

    Article  ADS  Google Scholar 

  43. A. Cros, R. Sal van, J. Derrien: Appl. Phys. A 28, 241 (1982)

    Article  ADS  Google Scholar 

  44. Y.S. Liu, S.W. Chiang, F. Bacon: Appl. Phys. Lett. 38, 1005 (1981)

    Article  ADS  Google Scholar 

  45. E. Fogarassy, C.W. White, D.H. Lowndes, J. Narayan: In Beam Solid Interactions and Phase Transformations, ed. by H. Kurz, G, L. Olson, J.M. Poate (MRS, Pittsburgh 1986) p. 173

    Google Scholar 

Recommendation for Further Reading

  • Allmen, M.von: Laser-Beam Interactions with Materials, Springer Ser. Mat. Sci., Vol.2 (Springer, Berlin, Heidelberg 1987)

    Google Scholar 

  • Aussenegg, F.R., A. Leitner, M. Lippitsch (eds.): Surface Studies with Lasers, Springer Ser. Chem. Phys., Vol.33 (Springer, Berlin, Heidelberg 1983)

    Google Scholar 

  • Bäuerle, D.: Chemical Processing with Lasers, Springer Ser. Mat. Sci., Vol.l (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  • Donnelly V.M., I.P. Herman, M. Hirose (eds.): Photon Beam and Plasma Stimulated Chemical Processes at Surfaces, MRS Symp. Proc. Vol.75 (MRS, Pittsburgh 1987)

    Google Scholar 

  • Gibbons, J.F.(ecL): CW Beam Processing of Silicon and Other Semiconductors, Vol.17 (Academic, New York 1984)

    Google Scholar 

  • Gutfeld R.J.von, J.E. Greene, H. Schlossberg (eds.); Beam Induced Chemical Processes, Extended Abstracts Symp.D, 1985 Fall Meeting Materials Research Society, Boston (MRS, Pittsburgh 1985)

    Google Scholar 

  • Howard R.E., E.L. Hu, S. Namba, S.W. Pang (eds.): Science and Technology of Microfabrication, MRS Symp Proc. Vol.76 (MRS, Pittsburgh 1987)

    Google Scholar 

  • Kurz H., G.L. Olson, J.M. Poate (eds.): Beam-Solid Interactions and Phase Transformations, MRS Symposia Proc. Vol.55 (MRS, Pittsburgh 1986)

    Google Scholar 

  • Le Lay G., J. Derrien, N. Boccara (eds.): Semiconductor Interfaces: Formation and Properties, Springer Proc. Phys., Vol.22 (Springer, Berlin, Heidelberg 1987)

    Google Scholar 

  • Nguyen V.T., D.J. Ehrlich: Emerging Technologies for In-Situ Processing (Nijhoff, Dordrecht 1987)

    Google Scholar 

  • Wood R.F., C.W. White, R.T. Young (eds.): Pulsed Laser Processing of Semiconductors, Semiconductors and Semimetals, Vol.23 (Academic, New York 1984)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electronic and Electrical Engineering, University College London, Torrington Place, London, WCIE 7JE, UK

    Dr. Ian W. Boyd

Authors
  1. Dr. Ian W. Boyd
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

Copyright information

© 1987 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Boyd, I.W. (1987). Summary and Conclusions. In: Laser Processing of Thin Films and Microstructures. Springer Series in Materials Science, vol 3. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-83136-2_8

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-83136-2_8

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-83138-6

  • Online ISBN: 978-3-642-83136-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation