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Experimental Considerations

  • Ian W. Boyd
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 3)

Abstract

In this chapter the essential experimental criteria for laser processing are considered. Firstly, the basic properties of laser beams are briefly reviewed, including the definitions of spot size, divergence, depth of focus etc, as well as the characteristics of beam propagation. Optical resolution is also discussed, not only in terms of the properties of the laser radiation, but also particular physical and chemical mechanisms that ultimately can control spatial line widths. Then the many varied modes of laser processing that have been used over the past few years are introduced and summarised. Particular attention is given here to pattern replication methods. The practical aspects of process uniformity and repeatability, as well as beam profile engineering and measurement are also described in this chapter.

Keywords

Laser Beam Spot Size Excimer Laser Laser Processing Beam Profile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1987

Authors and Affiliations

  • Ian W. Boyd
    • 1
  1. 1.Department of Electronic and Electrical EngineeringUniversity College LondonLondonUK

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