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Secondary Ion Mass Spectrometry SIMS V pp 164–166Cite as

Improvement of an Ion Microprobe Mass Analyzer (IMMA)

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Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

Abstract

For the analysis of dopant elements in semiconductors an intense primary ion beam, high transmission efficiency for the secondary ion mass spectrometer and sensitive detection of secondary ions are essential. We found that the performance of our IMMA (manufacturer Applied Research Laboratories) could be improved in these areas.

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References

  1. W. Bedrich, B. Koch, H. Mai, U. Seidenkranz, H. Syhre and R. Voigtmann, SIMS III (Proc. Int. Conf., Eds. A. Benninghoven et al) Springer Verlag Berlin 1979, p. 81

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  2. B.L. Bentz and H. Liebl, ibid, p. 30

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Author information

Authors and Affiliations

  1. Forschungsinstitut der Deutschen Bundespost, D-6100, Darmstadt, Germany

    K. Miethe & A. Pöcker

Authors
  1. K. Miethe
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  2. A. Pöcker
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Alfred Benninghoven

  2. Chemistry Division, Naval Research Laboratory, 20375, Washington, DC, USA

    Richard J. Colton

  3. Center for Analytical Chemistry, National Bureau of Standards, 20899, Gaithersburg, MD, USA

    David S. Simons

  4. Philips Research Laboratories, NL-Eindhoven, The Netherlands

    Helmut W. Werner

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© 1986 Springer-Verlag Berlin Heidelberg

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Cite this paper

Miethe, K., Pöcker, A. (1986). Improvement of an Ion Microprobe Mass Analyzer (IMMA). In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_40

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  • DOI: https://doi.org/10.1007/978-3-642-82724-2_40

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82726-6

  • Online ISBN: 978-3-642-82724-2

  • eBook Packages: Springer Book Archive

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