Improvement of an Ion Microprobe Mass Analyzer (IMMA)

  • K. Miethe
  • A. Pöcker
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 44)


For the analysis of dopant elements in semiconductors an intense primary ion beam, high transmission efficiency for the secondary ion mass spectrometer and sensitive detection of secondary ions are essential. We found that the performance of our IMMA (manufacturer Applied Research Laboratories) could be improved in these areas.


Depth Resolution High Transmission Efficiency Daly Detector Cesium Beam Multiplier Pulse 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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  1. 1.
    W. Bedrich, B. Koch, H. Mai, U. Seidenkranz, H. Syhre and R. Voigtmann, SIMS III (Proc. Int. Conf., Eds. A. Benninghoven et al) Springer Verlag Berlin 1979, p. 81Google Scholar
  2. 2.
    B.L. Bentz and H. Liebl, ibid, p. 30Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1986

Authors and Affiliations

  • K. Miethe
    • 1
  • A. Pöcker
    • 1
  1. 1.Forschungsinstitut der Deutschen BundespostDarmstadtGermany

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