Improvement of an Ion Microprobe Mass Analyzer (IMMA)
For the analysis of dopant elements in semiconductors an intense primary ion beam, high transmission efficiency for the secondary ion mass spectrometer and sensitive detection of secondary ions are essential. We found that the performance of our IMMA (manufacturer Applied Research Laboratories) could be improved in these areas.
KeywordsDepth Resolution High Transmission Efficiency Daly Detector Cesium Beam Multiplier Pulse
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