Abstract
An ultra-high vacuum secondary ion mass spectrometer has been assembled from commercially available components. By doing this, the cost has been held to around $100,000.
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References
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Ion gun manufactured by FEI Inc., 2575 Cathryn, Hillsboro, OR 97124
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© 1986 Springer-Verlag Berlin Heidelberg
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Schroeer, J.M., Puretz, J. (1986). Secondary Ion Mass Spectrometer with Liquid Metal Field Ion Source and Quadrupole Mass Analyzer. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_33
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DOI: https://doi.org/10.1007/978-3-642-82724-2_33
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-82726-6
Online ISBN: 978-3-642-82724-2
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