Hydrogen Profiling in Titanium
Measurements of the hydrogen concentration in metals using secondary ion mass spectrometry (SIMS) can be made by monitoring either atomic hydrogen ion emission or the ratio of metal-hydride to metal ion emission. BENNINGHOVEN and co-workers [1,2] have shown that the latter approach is less susceptible to matrix effects and more quantitative. For titanium, overlap between metal-hydride and metal ion emission occurs in typical SIMS measurements because the five naturally occurring Ti isotopes have adjacent masses. This complication has led to the development of several methods to extract the TiH+/Ti+ ratio from SIMS data . This paper will describe the various methods and evaluate them in terms of accuracy and data collection efficiency.
KeywordsTitanium Hydride Monohydride
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