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Hydrogen Profiling in Titanium

  • R. Bastasz
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 44)

Abstract

Measurements of the hydrogen concentration in metals using secondary ion mass spectrometry (SIMS) can be made by monitoring either atomic hydrogen ion emission or the ratio of metal-hydride to metal ion emission. BENNINGHOVEN and co-workers [1,2] have shown that the latter approach is less susceptible to matrix effects and more quantitative. For titanium, overlap between metal-hydride and metal ion emission occurs in typical SIMS measurements because the five naturally occurring Ti isotopes have adjacent masses. This complication has led to the development of several methods to extract the TiH+/Ti+ ratio from SIMS data [3]. This paper will describe the various methods and evaluate them in terms of accuracy and data collection efficiency.

Keywords

Exact Method Signal Ratio Natural Isotopic Abundance Total Sampling Time Data Collection Efficiency 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    A. Benninghoven, P. Beckmann, D. Greifendorf, K. -H. Müller, and M. Schemmer: Surf. Sci. 107 148 (1981)Google Scholar
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    M. Schemmer, P. Beckmann, D. Greifendorf, and A. Benninghoven: In Secondary Ion Mass Spectrometry SIMS-III, ed. by A. Benninghoven, J. Giber, J. László, M. Riedel, and H. W. Werner, Springer Series in Chemical Physics, Vol. 19, ( Springer, Berlin, Heidelberg, New York 1982 ) p. 405Google Scholar
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    R. Bastasz J. Vac. Sci. Technol. A 3, 1363 (1985)ADSGoogle Scholar
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    J. P. Biersack and L. G. Haggmark: Nucl. Instrum. Meth. 174 257 (1980)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1986

Authors and Affiliations

  • R. Bastasz
    • 1
  1. 1.Sandia National LaboratoriesLivermoreUSA

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