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Micro Machining by Pulsed Laser Radiation

  • R. Poprawe
  • H. G. Treusch
Conference paper

Abstract

Nowadays the most widely used lasers in micro machining are CO2- and Nd-YAG-lasers. High technical reliability combined with good beam quality made possible many industrial applications. However, especially high precission processing of metals in the µm-range still is a point of laboratory investigation.

Therefore, in this paper characteristic elements of micro processing by laser radiation such as plasma absorption and processing velocity are discussed. In addition to CO2- and Nd-YAG lasers the properties of excimer lasers are included. Because of the short wavelength of UV-excimer laser radiation and the resulting high focussability these lasers might play a dominant role in processing structures in the sub-µm-region.

Keywords

Laser Radiation Hole Wall Vaporization Front Streak Image Good Beam Quality 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin, Heidelberg 1986

Authors and Affiliations

  • R. Poprawe
    • 1
  • H. G. Treusch
    • 1
  1. 1.Fraunhofer Institute of Laser TechnologyAachenGermany

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