Micro Machining by Pulsed Laser Radiation

  • R. Poprawe
  • H. G. Treusch
Conference paper

Abstract

Nowadays the most widely used lasers in micro machining are CO2- and Nd-YAG-lasers. High technical reliability combined with good beam quality made possible many industrial applications. However, especially high precission processing of metals in the µm-range still is a point of laboratory investigation.

Therefore, in this paper characteristic elements of micro processing by laser radiation such as plasma absorption and processing velocity are discussed. In addition to CO2- and Nd-YAG lasers the properties of excimer lasers are included. Because of the short wavelength of UV-excimer laser radiation and the resulting high focussability these lasers might play a dominant role in processing structures in the sub-µm-region.

Keywords

Drilling Sapphire Coupler 

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Copyright information

© Springer-Verlag Berlin, Heidelberg 1986

Authors and Affiliations

  • R. Poprawe
    • 1
  • H. G. Treusch
    • 1
  1. 1.Fraunhofer Institute of Laser TechnologyAachenGermany

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