The Fabrication Technology of Rayleigh Wave Devices

  • R. Veith
Part of the Springer Series on Wave Phenomena book series (SSWAV, volume 2)

Abstract

The need grows for communication forces telecommunication engineers to transmit more information over a limited number of channels in cable, fiberoptic, terrestrial radio and satellite networks. With a given bandwidth per channel the only way to increase information capacity is to improve the dynamic range or signal to noise ratio. This requires stable frequency sources and filters precisely matched to a signal spectrum in amplitude and phase.

Keywords

Quartz Epoxy Lution Reso Coupler 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    H. Matthews: Surface Wave Filters-Design, Construction and Use( John Wiley and Sons, New York 1977 )Google Scholar
  2. 2.
    D.P. Morgan: Surface Wave Devices for Signal Processing(Elsevier Science Publishers Amsterdam 1985)Google Scholar
  3. 3.
    C.S. Hartmann: “Systems Impact of Modern Rayleigh Wave Technology”, this issueGoogle Scholar
  4. 4.
    G. Eberharter, H.P. Feurbaum: “Scanning Electron Microscope Observations of Propagating Acoustic Waves in Surface Acoustic Wave Devices”, Appl. Phys. Lett. 37, pp. 698–699, 1980ADSCrossRefGoogle Scholar
  5. 5.
    F.G. Marshall, C.O. Newton, E.G.S. Paige, “Surface Acoustic Wave Multistrip Components and their Applications”, IEEE Trans. MTT, MTT-21, pp. 216–224, 1973Google Scholar
  6. 6.
    R. Williamson, H. Smith: “The Use of Surface-Elastic-Wave Reflection Gratings in Large Time-Bandwidth Pulse-Compression Filters”, IEEE Trans. MTT, MTT-21, pp. 195–205, 1973Google Scholar
  7. 7.
    W. Tanski:“Multipole SAW Resonator Filters: Elements of Design and Fabrication”, IEEE Ultrasonics Symp. Proc., pp. 100–104, 1981Google Scholar
  8. 8.
    W.E. Bulst, H. Eschler, “Akustisches Wellenfilter”, German patent DE 2909705, C2, 1979Google Scholar
  9. 9.
    L.P. Solie: “Surface Acoustic Wave Reflective Dot Array”, Appl. Phys. Lett. 28, p. 420, 1976ADSCrossRefGoogle Scholar
  10. 10.
    G. Riha, H.R. Stocker, R. Veith, W.E. Bulst: “RAC-Filters with Position Weighted Metallic Strip Arrays”, IEEE Ultrasonics Symp. Proc., pp. 83–87, 1983Google Scholar
  11. 11.
    C. Maerfeld: “Rayleigh Wave Non-Linear Components”, this issueGoogle Scholar
  12. 12.
    H.P. Grassi, H. Engan: “Small Aperture Focussing Chirp Transducers vs. Diffraction Compensated Beam Compressors in Elastic SAW Convolvers”, accepted for publication in IEEE Trans. SU, 1985Google Scholar
  13. 13.
    A.J. Slobodnik, “Surface Acoustic Waves and SAW Materials”, Proceedings IEEE, 64, pp. 581–595, 1976CrossRefGoogle Scholar
  14. 14.
    E. Willibald: “Auswirkung von Kristalldefekten in den Piezoelektrika Lithiumniobat and Quarz auf die Ausbreitung Akustischer Oberflächenwellen”, Thesis, Technical University Munich, 1983Google Scholar
  15. 15.
    E. Ehrmann-Falkenau, H.R. Stocker, C. Ruppel, W.R. Mader, “SAW-Filters for Spectral Shaping in a 140 MBit/s Digital Radio System Using 16 QAM”, IEEE Ultrasonics Symp. Proc., pp. 17–22, 1983Google Scholar
  16. 16.
    W. Till, E. Ehrmann-Falkenau: private communicationGoogle Scholar
  17. 17.
    G. Tobolka, W. Faber, E. Ehrmann-Falkenau: private communicationGoogle Scholar
  18. 18.
    H. Smith, “Surface Wave Device Fabrication”, in ref. 1., pp. 165–217Google Scholar
  19. 19.
    K. Yamanouchi, T. Meguro, Y. Wagatsuma: “Characteristics of 5 GHz SAW Filter Fabricated by Electron Beam Exposure”, Japan. Journ. Acoustical Soc., pp. 643–644, March 1985Google Scholar
  20. 20.
    W.G. Oldham, A.R. Neureuther: “Projection Lithography with High Numerical Aperture Optics”, Solid State Technology, pp. 106–11, 140, May 1981Google Scholar
  21. 21.
    P. Zibis, G. Nösekabel, U. Knauer: private communicationGoogle Scholar
  22. 22.
    W. E. Bulst, E. Willibald: “Ultrareproducible SAW Resonator Production”, 36th Annual Frequency Control Symp. Proc., pp. 442–447, 1982Google Scholar
  23. 23.
    H.R. Stocker, R. Veith, E. Willibald, G. Riha: “Surface Wave Pulse Compression Filters with Long Chirp Time”, IEEE Ultrasonics Symp. Proc., pp. 78–82, 1981Google Scholar
  24. 24.
    A.J. Slobodnik, T.L. Szabo, K.R. Laker: “Miniature Surface Acoustic Wave Filters”, Proceedings IEEE, 67, pp. 129–146, 1979ADSCrossRefGoogle Scholar
  25. 25.
    G. Tobolka, W. Faber, G. Albrecht, D. Pilz: “High Volume TV IF Filter Design, Fabrication and Applications”, IEEE Ultrasonics Symp. Proc., pp. 1-2, 1984Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1985

Authors and Affiliations

  • R. Veith
    • 1
  1. 1.Siemens AGMünchen 80Fed. Rep. of Germany

Personalised recommendations