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Non-Thermal Laser-Induced Desorption of Compound Semiconductors

  • Takeyoshi Nakayama
  • Noriaki Itoh
Part of the Springer Series in Surface Sciences book series (SSSUR, volume 4)

Abstract

It has been well established that excitation of core electrons produces the sputtering or desorption in wide ranges of metal oxides and adsorbate-substrate systems [1–3]. On the other hand fundamental excitation is known to cause sputtering only in some specific insulators, such as alkali and silver halides [4,5]. Similarly electronic excitation below core-excitation energies causes desorption of neutral or negative species in some specific adsorbate-substrate systems [6–9]. What we deal with in this paper is the sputtering induced by electronic excitation, which belongs neither of the categories described above: the sputtering of compound semiconductors induced by dense fundamental excitation. The intensity of the photon beams employed in the works dealt with in the present paper is much lower than that employed for the laser-annealing experiments [10,11] or than the intensity that causes melting.

Keywords

Electronic Excitation Laser Fluence Compound Semiconductor Alkali Halide Silver Halide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1985

Authors and Affiliations

  • Takeyoshi Nakayama
    • 1
  • Noriaki Itoh
    • 1
  1. 1.Department of Crystalline Materials Science, Faculty of EngineeringNagoya UniversityNagoya 464Japan

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