Inelastic Effects in Sputtering of Frozen Gases by keV Ions

  • R. Pedrys
  • D. J. Oostra
  • A. E. de Vries
Part of the Springer Series in Surface Sciences book series (SSSUR, volume 4)


Recent experiments show that MeV ions passing through frozen gases cause an erosion that is at least one order of magnitude higher than predicted by classical theory. When frozen molecules of different atomic species are bombarded, mobile fragments and even new molecules as compared to the starting material have been observed within the target. Since a cascade of collisions resulting from single elastic collisions of the incident particles with target atoms account for only a very small fraction of the energy loss of MeV ions, the inelastic collisions are assumed to be exclusively responsible for the observed features [1,2].


Target Atom Dissociative Excitation Collision Cascade Repulsive State Ionic Exciton 
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Copyright information

© Springer-Verlag Berlin Heidelberg 1985

Authors and Affiliations

  • R. Pedrys
    • 2
  • D. J. Oostra
    • 1
  • A. E. de Vries
    • 1
  1. 1.FOM-Institute for Atomic and Molecular PhysicsAmsterdamThe Netherlands
  2. 2.Institute of PhysicsJagiellonian UniversityKrakówPoland

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