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ESD Neutrals from Chemisorbed and Physisorbed Species: Angular and Energy Distributions

  • P. Feulner
Conference paper
Part of the Springer Series in Surface Sciences book series (SSSUR, volume 4)

Abstract

Methods based on ordinary mass spectrometers equipped with electron impact ionizers to record angular and energy distributions of neutrals desorbed by electron stimulation are described. Data from chemisorbed and physisorbed adsorbates are presented. The results from chemisorbed layers are interpreted in a MGR framework, whereas data from physisorbed species can be understood assuming that desorption takes place via an Antoniewicz mechanism.

Keywords

Angular Distribution Polar Angle Quadrupole Mass Spectrometer Drift Tube Entrance Aperture 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1985

Authors and Affiliations

  • P. Feulner
    • 1
  1. 1.Fakultät für Physik E 20Technische Universität MünchenGarching b. MünchenFed. Rep. of Germany

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