ESD Neutrals from Chemisorbed and Physisorbed Species: Angular and Energy Distributions

  • P. Feulner
Conference paper
Part of the Springer Series in Surface Sciences book series (SSSUR, volume 4)


Methods based on ordinary mass spectrometers equipped with electron impact ionizers to record angular and energy distributions of neutrals desorbed by electron stimulation are described. Data from chemisorbed and physisorbed adsorbates are presented. The results from chemisorbed layers are interpreted in a MGR framework, whereas data from physisorbed species can be understood assuming that desorption takes place via an Antoniewicz mechanism.


Angular Distribution Polar Angle Quadrupole Mass Spectrometer Drift Tube Entrance Aperture 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    See,e.g., M.L.Knotek, Rep.Prog.Phys. 47 (1984) 1499Google Scholar
  2. D.Menzel, J.Vac.Sci.Technol. 20, 3 (1982) 538Google Scholar
  3. 2.
    D.Lichtman, DIET I, edited by N.Tolk, M.M.Traum, J.C.Tully and T.E.Madey, ( Springer, Berlin 1983 ) 117Google Scholar
  4. 3.
    M.J.Drinkwine and D.Lichtman, Progress in Surface Science 8 (1977) 123CrossRefGoogle Scholar
  5. 4.
    P. Feulner,R. Treichler and D. Menzel, Phys.Rev.B 24 (1981) 355CrossRefGoogle Scholar
  6. 5.
    P. Feulner and D. Menzel, J.Vac.Sci.Technol. 17, 2 (1980) 662Google Scholar
  7. 6.
    M. Kobayashi, M. Kim and Y. Tuzi, Proc.VII IVC-V ICSS, Vienna (1977) 1023Google Scholar
  8. Y. Tuzi and M. Kobayashi, Proc.IX IVC-V ICSS, Madrid (1983) 203Google Scholar
  9. H.P. Steinrueck, A. Winkler and K.D. Rendulic, J.Phys.C:Solid State Phys., 17 (1984) L311CrossRefGoogle Scholar
  10. 7.
    N.Tolk, this volumeGoogle Scholar
  11. 8.
    Angular distributions: P. Feulner, W. Riedl and D. Menzel, Phys.Rev.Lett. 50 (1983) 986Google Scholar
  12. Energy distributions: P. Feulner, D. Menzel, H. J. Kreuzer and Z.W. Gortel, Phys.Rev.Lett. 53 (1984) 671Google Scholar
  13. 9.
    See,e.g.,H. Pfnür and D. Menzel, J.Chem.Phys. 79 (1983) 2400Google Scholar
  14. 10.
    I.G. Newsham and D.R. Sandstrom, J.Vac.Sci.Technol. 10 (1973) 39CrossRefGoogle Scholar
  15. 11.
    D. Menzel and R. Gomer, J.Chem.Phys. 41 (1964) 3311CrossRefGoogle Scholar
  16. P.A. Redhead, Can.J.Phys. 42 (1964) 886CrossRefGoogle Scholar
  17. 12.
    H.Schlichting, diploma thesis, TU München (1981)Google Scholar
  18. 13.
    E. Umbach and D. Menzel, Chem.Phys.Lett. 84 (1981) 491CrossRefGoogle Scholar
  19. 14.
    P.R. Antoniewicz, Phys.Rev.B 21 (1980) 3811CrossRefGoogle Scholar
  20. 15.
    E.R. Moog, J. Unguris and M.B. Webb, Surf.Sci. 134 (1983) 849CrossRefGoogle Scholar
  21. Q.J.Zhang and R. Gomer, Surf.Sci. 109 (1981) 567CrossRefGoogle Scholar
  22. P. Feulner, Thesis, TU München (1980) 62Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1985

Authors and Affiliations

  • P. Feulner
    • 1
  1. 1.Fakultät für Physik E 20Technische Universität MünchenGarching b. MünchenFed. Rep. of Germany

Personalised recommendations