Abstract
Current interests at British Telecom Research Laboratories include advanced optoelectronic and integrated optics device structures in III–V semiconducting materials. To improve device yields, alternative methods for preparation and fabrication of these structures are evaluated. For example, contact metallisations for III–V optoelectronic devices are conventionally defined by photolithography, a multi-stage process. It has been shown that focused laser beams can be used to pyrolytically or photolytically deposit localised regions of many materials on various substrates, and also for localised etching; a recent review is given in [1].
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
D.J. Ehrlich and J.Y. Tsao. J. Vac. Sci. Technol. Bl(4). Oct.-Dec. 1983, 969.
For example, D.J. Ehrlich, R. M. Osgood, Jr. and T. F. Deutsch. J. Electrochem. Soc. 128 (9), 1981, 2041.
For example, R. Solanki and G.J. Collins, Appl. Phys. Lett. 42 (8), 1983, 662.
T. F. Deutsch. D.J. Ehrlich, R. M. Osgood, Jr. and Z. L. Llau, Appl. Phys. Lett. 36 (10), 1980, 847.
T. F. Deutsch. D.J. Ehrlich and R. M. Osgood. Jr.. Appl. Phys. Lett. 35 (2). 1979. 175.
D.J. Ehrlich. R. M. Osgood. Jr. and T. F. Deutsch. IEEE J. Quantum Electronics QE-16(11). Nov. 1980. 1233.
D.J. Ehrlich. R. M. Osgood. Jr. and T. F. Deutsch. Appl. Phys. Lett. 36 (8). 1980. 698.
BS 4803, ‘Radiation safety of laser products and systems.’ British Standards Institution, 1983.
Reported at 2nd. International Conference on Metallo-Organic Vapour Phase Epitaxy, Sheffield, UK. April 1984.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1984 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Aylett, M.R., Halgh, J. (1984). Laser Photolytic Deposition of Metals on Indium Phosphide. In: Bäuerle, D. (eds) Laser Processing and Diagnostics. Springer Series in Chemical Physics, vol 39. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82381-7_35
Download citation
DOI: https://doi.org/10.1007/978-3-642-82381-7_35
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-82383-1
Online ISBN: 978-3-642-82381-7
eBook Packages: Springer Book Archive