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Surface Modelling During Laser Microprocessing

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Laser Processing and Diagnostics

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 39))

Abstract

The spatially periodic surface structures impressed during laser material processing on metals and semiconductors are investigated as a function of intensity, pulse duration, polarization, and angle of incidence. The threshold intensity for the formation of the surface damage pattern is determined with respect to illumination conditions and material parameters. The initial and the laser-induced microroughness of the surface influence the evolution of the damage.

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References

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Author information

Authors and Affiliations

  1. Institut für Angewandte Physik, Technische Hochschule Darmstadt, Schloßgartenstr. 7, D-6100, Darmstadt, Fed. Rep. of Germany

    E. W. Kreutz, M. Krösche, H. G. Treusch & G. Herziger

Authors
  1. E. W. Kreutz
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  2. M. Krösche
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  3. H. G. Treusch
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  4. G. Herziger
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Editor information

Editors and Affiliations

  1. Institut für Angewandte Physik, Johannes-Kepler-Universität, A-4040, Linz, Austria

    Dieter Bäuerle

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© 1984 Springer-Verlag Berlin Heidelberg

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Kreutz, E.W., Krösche, M., Treusch, H.G., Herziger, G. (1984). Surface Modelling During Laser Microprocessing. In: Bäuerle, D. (eds) Laser Processing and Diagnostics. Springer Series in Chemical Physics, vol 39. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82381-7_15

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  • DOI: https://doi.org/10.1007/978-3-642-82381-7_15

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82383-1

  • Online ISBN: 978-3-642-82381-7

  • eBook Packages: Springer Book Archive

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