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Depth Profiling of Evaporated Se-Te Films with SIMS

  • Conference paper
Book cover Secondary Ion Mass Spectrometry SIMS IV

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 36))

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Abstract

The Se-based photoconductor is widely used in photoconductive printing. Depth profiling of elements of major components and also low concentration dopants and impurities is desirable to understand the photoconductive behavior of the materials. However, until recently, use of SIMS on chalcogen photocon-ductors has been minimal because of the charging problem encountered in the measurement.

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References

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Author information

Authors and Affiliations

  1. Toray Research Center, Inc., Sonoyama, Otsu, Shiga 520, Japan

    F. Soeda, K. Okuno & A. Ishitani

  2. Fuji Electric Company Limited, Tsukama, Matsumoto, Nagano 390, Japan

    M. Nagano & T. Iijima

Authors
  1. F. Soeda
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  2. K. Okuno
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  3. A. Ishitani
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  4. M. Nagano
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  5. T. Iijima
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Editor information

Editors and Affiliations

  1. Phsysikalisches Inst., Universität Münster, Münster, D-4400, Fed. Rep. of Germany

    A. Benninghoven

  2. College of General Education, Osaka University, Osaka 560, Japan

    J. Okano

  3. Department of Applied Physics, Osaka University, Osaka 565, Japan

    R. Shimizu

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1984 Springer-Verlag Berlin Heidelberg

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Soeda, F., Okuno, K., Ishitani, A., Nagano, M., Iijima, T. (1984). Depth Profiling of Evaporated Se-Te Films with SIMS. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_85

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  • DOI: https://doi.org/10.1007/978-3-642-82256-8_85

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82258-2

  • Online ISBN: 978-3-642-82256-8

  • eBook Packages: Springer Book Archive

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