Depth Profiling of Evaporated Se-Te Films with SIMS

  • F. Soeda
  • K. Okuno
  • A. Ishitani
  • M. Nagano
  • T. Iijima
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

The Se-based photoconductor is widely used in photoconductive printing. Depth profiling of elements of major components and also low concentration dopants and impurities is desirable to understand the photoconductive behavior of the materials. However, until recently, use of SIMS on chalcogen photocon-ductors has been minimal because of the charging problem encountered in the measurement.

Keywords

Chlorine Chalcogen 

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References

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Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • F. Soeda
    • 1
  • K. Okuno
    • 1
  • A. Ishitani
    • 1
  • M. Nagano
    • 2
  • T. Iijima
    • 2
  1. 1.Toray Research Center, Inc.Sonoyama, Otsu, Shiga 520Japan
  2. 2.Fuji Electric Company LimitedTsukama, Matsumoto, Nagano 390Japan

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