Comparison of Oxygen and Indium Primary Ion Beams for SIMS-Depth Profiling

  • J. D. Brown
  • M. J. Higatsberger
  • F. G. Ruedenauer
  • W. Steiger
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

Liquid metal ion sources (LMIS) have recently received increased attention as a possible alternative to conventional primary ion sources in scanning SIMS. The main hope in the introduction of LMIS primary ion guns lies in the implementation of a true submicron scanning ion microprobe with an expected spatial resolution limit below 100 nm [1], [2]. While good progress has been made towards this particular goal [3],[2], very little has been reported C23 on the use of LMIS guns in depth profiling. Here, we want to report on a comparison of depth profiling capabilities using oxygen and In primary beams from a duoplasmatron and a LMIS respectively.

Keywords

GaAs 

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References

  1. 1.
    R.L. Gerlach, in “Secondary Ion Mass Spectrometry; SIMS III”, ed. by A. Benninghoven, J. Giber, J. Laszlo, M. Riedel and H.W. Werner, (Springer, Berlin 1982) p.22Google Scholar
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Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • J. D. Brown
    • 1
  • M. J. Higatsberger
    • 2
  • F. G. Ruedenauer
    • 3
  • W. Steiger
    • 3
  1. 1.University of Western OntarioLondonCanada
  2. 2.University of Vienna, Inst. f. Exp. PhysicsWienAustria
  3. 3.Austria Res. Ctr. SeibersdorfWienAustria

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