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Comparison of Oxygen and Indium Primary Ion Beams for SIMS-Depth Profiling

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Secondary Ion Mass Spectrometry SIMS IV

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 36))

Abstract

Liquid metal ion sources (LMIS) have recently received increased attention as a possible alternative to conventional primary ion sources in scanning SIMS. The main hope in the introduction of LMIS primary ion guns lies in the implementation of a true submicron scanning ion microprobe with an expected spatial resolution limit below 100 nm [1], [2]. While good progress has been made towards this particular goal [3],[2], very little has been reported C23 on the use of LMIS guns in depth profiling. Here, we want to report on a comparison of depth profiling capabilities using oxygen and In primary beams from a duoplasmatron and a LMIS respectively.

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References

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Author information

Authors and Affiliations

  1. University of Western Ontario, London, N6A 5B9, Canada

    J. D. Brown

  2. University of Vienna, Inst. f. Exp. Physics, Strudlhofgasse 4, Wien, A-1090, Austria

    M. J. Higatsberger

  3. Austria Res. Ctr. Seibersdorf, Lenaugasse 10, Wien, A-1082, Austria

    F. G. Ruedenauer & W. Steiger

Authors
  1. J. D. Brown
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  2. M. J. Higatsberger
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  3. F. G. Ruedenauer
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  4. W. Steiger
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Editor information

Editors and Affiliations

  1. Phsysikalisches Inst., Universität Münster, Münster, D-4400, Fed. Rep. of Germany

    A. Benninghoven

  2. College of General Education, Osaka University, Osaka 560, Japan

    J. Okano

  3. Department of Applied Physics, Osaka University, Osaka 565, Japan

    R. Shimizu

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1984 Springer-Verlag Berlin Heidelberg

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Brown, J.D., Higatsberger, M.J., Ruedenauer, F.G., Steiger, W. (1984). Comparison of Oxygen and Indium Primary Ion Beams for SIMS-Depth Profiling. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_80

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  • DOI: https://doi.org/10.1007/978-3-642-82256-8_80

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82258-2

  • Online ISBN: 978-3-642-82256-8

  • eBook Packages: Springer Book Archive

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