Combined Spectrometer with the Techniques of SIMS, ISS, AES and XPS

Abstract

In order to realize “in situ observation” of a specimen using several surface analytical techniques, one usually needs to arrange several excitation sources, analyzers and detectors around the specimen. Furthermore, to pursue the best performance of each technique, it is essential to install the above devices as close to the specimen as possible. However, it is difficult to arrange them close to the specimen, because the size of the devices is fairly large. Model ASIX-1000, a combined surface analytical instrument developed by us, gives a solution to the problem by separating the main body into two portions connected with each other. One is for the micro-area analysis by SIMS (Secondary ion mass spectrometry), ISS (Ion scattering spectrometry) and AES (Auger electron spectrometry), and the other is for the macro-area analysis by XPS (X-ray photoelectron spectrometry). A specimen can be transferred between both portions in the same vacuum chamber.