Abstract
Several transition metal substrates and steel specimens were ion-implanted with various species including nitrogen, chromium, and titanium at doses from 1016 to 1018 atoms/cm2. The purpose of the implantation study was to modify the surfaces of the materials in order to improve their resistance to wear, fatigue, and corrosion [1,2].
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References
Ion Implantation, edited by J.K. Hirvonen (Academic Press, New York, 1980)
Ion Implantation Metallurgy, edited by CM. Preece and J.K. Hirvonen (Metallurgical Society of AIME, Warrendale, PA, 1980)
G. Dearnaley, P.D. Goode, N.E.W. Hartley, G.W. Proctor, J.F. Turner, and R.E.J. Watkins, Int’l Plating and Allied Techniques Conf. (London, July 1979)
I.L. Singer and J.S. Murday, J. Vac. Sci. Technol. 17, 327 (1980)
W. Bone, R.J. Colton, I.L. Singer, and C.R. Gossett, J. Vac. Sci. Technol., submitted.
Concentrations (in at.%) were calculated from peak to peak intensities from the d[E N(E)]/de Auger spectra using the following sensitivity factors: 0.17 for Fe(650eV) and 0.31 for N(379eV)
C.R. Gossett, in Industrial Application of Surface Analysis, L.A. Casper and C.J. Powell, Eds., ACS Symposium Sever, No. 199, Washington, D.C., 1982
W.M. Bone, R.J. Colton, I.L. Singer, and T.M. Barlak, presented at the 31st Annual Conference on Mass Spectrometry and Allied Topics; Boston, MA, May 8–13, 1983
M.L. Yu and W. Reuter, J. Appl. Phys. 52, 1478, 1489 (1981)
I.L. Singer and T.M. Barlak, Appl. Phys. Lett. 43, 457 (1983)
I.L. Singer, J. Vac. Sci. Technol. A 1, 419 (1983)
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© 1984 Springer-Verlag Berlin Heidelberg
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Bone, W.M., Barlak, T.M., Singer, I.L., Jeffries, R.A., Colton, R.J. (1984). Combined SIMS and Electron Spectroscopy Investigation of the Chemical State of Some Ion-Implanted Transition Metals and Steels. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_59
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DOI: https://doi.org/10.1007/978-3-642-82256-8_59
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