Development of High Performance Ion Microanalyzer

  • E. Izumi
  • Y. Kato
  • M. Yano
  • Y. Arima
  • H. Tamura
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

The ion microanalyzer (IMA) is the only surface analyzer which enables high sensitivity analysis of both surface and depth profile of various materials. Recently the IMA has been extensively utilized for quality control of diverse materials. Along with this, high sensitivity has been in increasing demand. The Model IMA-3 developed by Hitachi has realized an exceptionally high sensitivity, excellent resolution and ultrahigh vacuum owing to use of new ideas and technology.

Keywords

Titanium Boron Fluorine Kato 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • E. Izumi
    • 1
  • Y. Kato
    • 1
  • M. Yano
    • 1
  • Y. Arima
    • 1
  • H. Tamura
    • 2
  1. 1.Naka WorksHitachi Ltd.Katsuta, Ibaraki 312Japan
  2. 2.Central Research LaboratoryHitachi Ltd.Kokubunji, Tokyo 185Japan

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