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A Study on Argon Ion Gun in SIMS

  • Wang Jian-Hua
  • Li You-Zhe
  • Chen Pi-Jin
  • Long Zhi-Qiao
  • Ho Xiao-Fang
  • Zhang Quan-Zhen
  • Zhang Zhen-Xiang
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

In order to use SIMS for static state, sweeping and composition profiling analysis on specimen, an ion source of electron impact ionization type with beam-forming electrode [1,2] is investigated, besides the potential distribution in the ion source and ion trajectories in the exit system are calculated using numerical method. The results show that this ion source is capable to produce a beam with small initial energy spread and high ion yield, then a small ion beam spot could be obtained by means of suitable ion optical system and filter.

Keywords

Potential Distribution Electron Impact Ionization Grid Mesh Electrode Aper Exit System 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    Khan and Schroeer, Rev. Sci. Instrum. Vol.42, 1971, p.1348CrossRefGoogle Scholar
  2. 2.
    E.V.Kornelson, J. Vac. Sci. Technol. Vol.13, 1976Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • Wang Jian-Hua
    • 1
  • Li You-Zhe
    • 1
  • Chen Pi-Jin
    • 1
  • Long Zhi-Qiao
    • 2
  • Ho Xiao-Fang
    • 2
  • Zhang Quan-Zhen
    • 2
  • Zhang Zhen-Xiang
    • 2
  1. 1.Department of Radio ElectronicsTsinghua UniversityBeijingChina
  2. 2.Beijing Vacuum Electron Devices Research InstituteBeijingChina

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