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Secondary Ion Mass Spectrometry SIMS IV pp 119–123Cite as

Submicron Ion Probes

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Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 36))

Abstract

An increased interest in developing focused ion beams has arisen in recent years. This was motivated by a great success of liquid metal ion (LMI) source technology. Primary experiments with this type of source originated in the 1960’s. Mahoney et al.[1] used a capillary emitter to obtain ion emissions of cesium, although their purpose was in an ion thruster. For a similar purpose Bailey[2] built an ion emitter which is thought to be an original model of the present LMI sources. Evans and Hendricks[3] used an alloy type LMI source of Ga-In as an ion source for mass spectrometry. Krohn and Ringo[4] built a focusing system, using an electrostatic einzel lens with a Ga source. Prewett and Jefferies[5] developed ion sources consisting of a capillary and a needle, which are almost the same configuration as that of Bailey’s. Seliger et al.[7] originally realized an ion probe of less than 1 micron in diameter, using a Ga ion source made by Clampitt’s group. Emission characteristics of LMI sources were intensively studied by Swanson et al.[8].

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Authors and Affiliations

  1. Jeol Ltd., Nakagami-cho 1418, Akishima, Tokyo 196, Japan

    N. Anazawa & R. Aihara

Authors
  1. N. Anazawa
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  2. R. Aihara
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Editor information

Editors and Affiliations

  1. Phsysikalisches Inst., Universität Münster, Münster, D-4400, Fed. Rep. of Germany

    A. Benninghoven

  2. College of General Education, Osaka University, Osaka 560, Japan

    J. Okano

  3. Department of Applied Physics, Osaka University, Osaka 565, Japan

    R. Shimizu

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1984 Springer-Verlag Berlin Heidelberg

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Anazawa, N., Aihara, R. (1984). Submicron Ion Probes. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_34

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  • DOI: https://doi.org/10.1007/978-3-642-82256-8_34

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82258-2

  • Online ISBN: 978-3-642-82256-8

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