Abstract
In the evolution of a basis for quantitative compositional analysis in an instrumental technique, the development of standards plays a critical role. For techniques which utilize a primary beam of radiation to excite secondary radiation which is characteristic of the sample composition, the measured signal intensity i for a constituent x is a complex function of C, the atomic concentration, specimen parameters (that is, matrix effects M), and instrument parameters I:
If the interactions of the primary and secondary radiation with the sample and the secondary radiation with the measuring instrument can be accurately described, then i could be measured and C calculated directly. Unfortunately, it is rare in any of the instrumental analysis techniques to obtain such complete characterization of the matrix and instrumental factors, and this is particularly true for secondary ion mass spectrometry (SIMS). In SIMS the secondary ion signals are strongly affected by the electronic character of the matrix [1], by modifications of the matrix due to implantation of the primary ions [2], by adsorbed atoms on the sample surface [3], and in crystalline samples, by effects of crystal orientation [4]. To complicate further this situation, the collection, transmission, and detection efficiencies of the mass spectrometer are not uniform with mass and may be difficult to measure or calculate accurately.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
C.A. Anderson and J.R. Hinthorne, Anal. Chem. 45 (1973) 1421.
V.R. Deline, C.A. Evans, Jr., and P. Williams, Appl Phys Lett 33 (1978) 578.
M.A. Rudat and G.H. Morrison, Int.J. Mass Spectrom. Ion Phys. 32 (1979) 233.
G.A.v.d. Schootbrugge, A.G.J. de Wit, and J.M. Fluit, Nucl. Instrum. and Methods 132 (1976) 321.
J.A. McHugh in Secondary Ion Mass Spectrometry, ed. K.F.J. Heinrich and D.E. Newbury, National Bureau of Standards (US) Special Publication 427, (Washington, 1975) 129.
D.P. Leta and G.H. Morrison, SIMS II (1979) 61.
R.B. Marinenko, K.F.J. Heinrich, and F.C. Ruegg, “Micro-Homogeneity Studies of NBS Standard Reference Materials, NBS Research Materials, and Other Related Samples, National Bureau of Standards (US) Special Publication 260–65 (Washington, 1979).
E. Steel, D. Newbury, and P. Pella, Analytical Electron Microscopy — 1981 (San Francisco Press, 1981) 65.
R.B. Marinenko, “Preparation and Characterization of K-411 and K-412 Mineral Glasses for Microanalysis: SRM 470”, National Bureau of Standards (US) Special Publication 260–74 (Washington, 1982).
R.G. Downing, R.F. Fleming, D.S. Simons, and D.E. Newbury, Microbeam Analysis-1982 (San Francisco Press) 219.
R.G. Downing, B. Stallard, D. Simons, and R. Fleming, Thin Solid Films (in review).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1984 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Newbury, D.E., Simons, D. (1984). The Role of Standards in Secondary Ion Mass Spectrometry. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_30
Download citation
DOI: https://doi.org/10.1007/978-3-642-82256-8_30
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-82258-2
Online ISBN: 978-3-642-82256-8
eBook Packages: Springer Book Archive