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Relative Sensitivity Factor of Compound Semiconductor by SIMS

  • K. Kusao
  • K. Tsukamoto
  • Y. Yoshioka
  • F. Konishi
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

The relative sensitivity factor (RSF) is generally used for quantitative analysis of elements by SIMS CID. Usually, the RSF has been discussed in connection with trace elements in standard samples. The RSF of major components has been seldom studied. In this paper, we consider the RSF in relation to the major components, namely, croup III and group V elements in the III-V semiconductors, where characteristics such as ionicity of the compound semiconductor are relatively well known.

Keywords

Compound Semiconductor Relative Sensitivity Factor Gallium Phosphide Group Versus Element Precise Experimental Condition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. [1].
    H.W. Werner, Surf. Interface Anal. 2, 56 (1980)CrossRefGoogle Scholar
  2. [2].
    G. Slodzian and J.F. Hennequin, C. R. Acad. Sci. Sér., B263, 1246 (1976)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • K. Kusao
    • 1
  • K. Tsukamoto
    • 1
  • Y. Yoshioka
    • 1
  • F. Konishi
    • 1
  1. 1.Matsushita Technoresearch Inc.Moriguchi, Osaka 570Japan

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