Abstract
The calibrational methods for SIMS use external (MISR(1, 2)) or internal (SAA (3, 4)) standards. The IMISR (Implantation Modificated Matrix Ion Species Ratio) method proposed by us (5) is a combination of these approaches and allows the quantification depth profiles of inhomogeneous samples. Using computer data processing the IMISR quantification can now be performed in five simple steps: 1. implantation of a “standard”, 2. depth profiling of the unknown, 3. depth profiling of the “standard” samples, 4. calibration, 5. (computer) data evaluation.
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© 1984 Springer-Verlag Berlin Heidelberg
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Giber, J., Solydom, A., Marton, D., Barsony, I. (1984). Simplified IMISR Method with Computer Data Acquisition. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_26
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DOI: https://doi.org/10.1007/978-3-642-82256-8_26
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