A Retarding-Accelerating Energy Analyser for SIMS
It is well known that secondary ion energy spectra can give us much interesting information. As a very high energy resolution is not needed for most cases, the retarding-accelerating energy analyser (derived from the Staib type energy analyser) for quadrupole based SIMS is very useful because of its ion acceptance from a large target surface and a large emitting angle. Unfortunately, knowledge of this analyser is very meager in spite of its being widely used in some modern instruments.
KeywordsEnergy Analyser Transmission Function High Energy Resolution Modern Instrument Exit Aperture
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- 1.P. Staib, J. Phys. E5, 484 (1972): Vacuum 22, 481 (1972): J. Phys. E10, 914 (1977)Google Scholar
- 3.P. H. Dawson and P. H. Redhead, R. S. I. 48, 159 (1977)Google Scholar
- 5.R. L. Ingrebert and J. F. Henninquin, SIMS-II, 57 (1981)Google Scholar
- 6.Zheng Zhao-Jia, Thesis(in Chinese), Tsinghua University (1982)Google Scholar