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A Retarding-Accelerating Energy Analyser for SIMS

  • Cha Liang-Zhen
  • Xue Zu-Qing
  • Zheng Zhao-Jia
  • Tong Yu-Qing
  • Wu Yong-Qing
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

It is well known that secondary ion energy spectra can give us much interesting information. As a very high energy resolution is not needed for most cases, the retarding-accelerating energy analyser (derived from the Staib type energy analyser[1]) for quadrupole based SIMS is very useful because of its ion acceptance from a large target surface and a large emitting angle. Unfortunately, knowledge of this analyser is very meager[2] in spite of its being widely used in some modern instruments[3][4][5].

Keywords

Energy Analyser Transmission Function High Energy Resolution Modern Instrument Exit Aperture 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    P. Staib, J. Phys. E5, 484 (1972): Vacuum 22, 481 (1972): J. Phys. E10, 914 (1977)Google Scholar
  2. 2.
    K. Wittmaach, Vacuum 32, 65 (1982)CrossRefGoogle Scholar
  3. 3.
    P. H. Dawson and P. H. Redhead, R. S. I. 48, 159 (1977)Google Scholar
  4. 4.
    A. R. Krauss and D. M. Gruen, Appl. Phys. 14, 89 (1977)CrossRefGoogle Scholar
  5. 5.
    R. L. Ingrebert and J. F. Henninquin, SIMS-II, 57 (1981)Google Scholar
  6. 6.
    Zheng Zhao-Jia, Thesis(in Chinese), Tsinghua University (1982)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • Cha Liang-Zhen
    • 1
  • Xue Zu-Qing
    • 1
  • Zheng Zhao-Jia
    • 1
  • Tong Yu-Qing
    • 1
  • Wu Yong-Qing
    • 1
  1. 1.Department of Radio-ElectronicsTsinghua UniversityBeijingChina

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