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Accurate Measurement of Energy Distribution Curves of Secondary Ions by UHV-IMMA

  • O. Tsukakoshi
  • K. Komatsu
  • S. Komiya
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

The UHV-IMMA [1] developed at ULVAC Laboratory has excellent capability to measure energy distribution of secondary ions. As shown in Figure 1, hemispherical electrostatic ion energy analyser (IEA) with central orbit radius of 1.5 cm has been designed and normal incidence of primary ion beam on the sample surface and extraction of secondary ion beam normal to the sample surface have been made possible.

Keywords

Hydrogen Isotope Cylindrical Lens Outer Electrode Entrance Aperture Excellent Capability 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    T. Satake, O. Tsukakoshi, A. Shimizu and S. Komiya, Jpn. J. Appl. Phys. 20, 1541 (1981).CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • O. Tsukakoshi
    • 1
  • K. Komatsu
    • 1
  • S. Komiya
    • 1
  1. 1.ULVAC CorporationChigasaki Kanagawa 253Japan

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