Intensities and Energy Spectra of Secondary Ions Sputtered from Fe-Al Alloys by Ar+ Ion Bombardment in Ultrahigh Vacuum
The main mechanism responsible for the emission of singly charged ions from ion-sputtered solid samples is known as the “surface excitation”, that is the electronic excitation of the outgoing particle during its separation from the target [1–3]. At a given velocity, such a process is governed by the electronic structure of the surface near the ejection point, and therefore is very sensitive to the local environment [4,5] . However the surface excitation model cannot explain the emission of multiply charged ions from light elements. In fact, to account for secondary ion emission from light metals, JOYES  early proposed a collisional mechanism where ionization results from Auger decay of collision-induced L-shell excitations and which is well supported by the observation of Auger electrons under ion bombardment .
KeywordsAuger Decay Surface Excitation Symmetric Collision Collisional Mechanism Ejection Point
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- 7.J.-F. Hennequin and P. Viaris de Lesegno, in : The Physics of Ionized Gases, ed. by M. Matic (Boris Kidric Institute, Beograd 1980) p. 341Google Scholar
- 8.R.-L. Inglebert and J.-F. Hennequin, J. Microsc. Spectrosc. Electron. 7, 257 (1982)Google Scholar
- 9.H.H. Andersen and H.L. Bay, in : Sputtering by Particle Bombardment I, ed. by R. Behrisch (Springer Verlag, Berlin-Heidelberg-New York), Topics Appl. Phys. 47, 145 (1981)Google Scholar
- 10.G. Blaise and G. Slodzian, C.R. Acad. Sci. (Paris) B 271, 1216 (1970)Google Scholar
- 11.R.-L. Inglebert and J.-F. Hennequin, in : Secondary Ion Mass Spectrometry, SIMS III, Springer Series in Chemical Physics, 19, 57 (1982)Google Scholar
- 17.J.-F. Hennequin, R.-L. Inglebert and P. Viaris de Lesegno, submitted to Surf. Sci.Google Scholar