Intensities and Energy Spectra of Secondary Ions Sputtered from Fe-Al Alloys by Ar+ Ion Bombardment in Ultrahigh Vacuum

  • R.-L. Inglebert
  • J.-F. Hennequin
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)


The main mechanism responsible for the emission of singly charged ions from ion-sputtered solid samples is known as the “surface excitation”, that is the electronic excitation of the outgoing particle during its separation from the target [1–3]. At a given velocity, such a process is governed by the electronic structure of the surface near the ejection point, and therefore is very sensitive to the local environment [4,5] . However the surface excitation model cannot explain the emission of multiply charged ions from light elements. In fact, to account for secondary ion emission from light metals, JOYES [6] early proposed a collisional mechanism where ionization results from Auger decay of collision-induced L-shell excitations and which is well supported by the observation of Auger electrons under ion bombardment [7].


Auger Decay Surface Excitation Symmetric Collision Collisional Mechanism Ejection Point 
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Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • R.-L. Inglebert
    • 1
  • J.-F. Hennequin
    • 1
  1. 1.C.N.R.S., Laboratoire P.M.T.M.Université Paris-NordVilletaneuseFrance

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