Advertisement

Intensities and Energy Spectra of Secondary Ions Sputtered from Fe-Al Alloys by Ar+ Ion Bombardment in Ultrahigh Vacuum

  • R.-L. Inglebert
  • J.-F. Hennequin
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)

Abstract

The main mechanism responsible for the emission of singly charged ions from ion-sputtered solid samples is known as the “surface excitation”, that is the electronic excitation of the outgoing particle during its separation from the target [1–3]. At a given velocity, such a process is governed by the electronic structure of the surface near the ejection point, and therefore is very sensitive to the local environment [4,5] . However the surface excitation model cannot explain the emission of multiply charged ions from light elements. In fact, to account for secondary ion emission from light metals, JOYES [6] early proposed a collisional mechanism where ionization results from Auger decay of collision-induced L-shell excitations and which is well supported by the observation of Auger electrons under ion bombardment [7].

Keywords

Auger Decay Surface Excitation Symmetric Collision Collisional Mechanism Ejection Point 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    A. Blandin, A. Nourtier and D.W. Hone, J. Physique 37, 369 (1976)CrossRefGoogle Scholar
  2. 2.
    J.K. Nørskov and B.I. Lundqvist, Phys. Rev. B 19, 5661 (1979)CrossRefGoogle Scholar
  3. 3.
    G. Blaise and A. Nourtier, Surf. Sci. 90, 495 (1979)CrossRefGoogle Scholar
  4. 4.
    P. Williams, Surf. Sci. 90, 588 (1979) ; Appl. Surf. Sci. 13 241 (1982)CrossRefGoogle Scholar
  5. 5.
    M.L. Yu, J. Vac. Sci. Technol. A 1, 500 (1983)CrossRefGoogle Scholar
  6. 6.
    P. Joyes, J. Physique 30, 243 and 365 (1969)CrossRefGoogle Scholar
  7. 7.
    J.-F. Hennequin and P. Viaris de Lesegno, in : The Physics of Ionized Gases, ed. by M. Matic (Boris Kidric Institute, Beograd 1980) p. 341Google Scholar
  8. 8.
    R.-L. Inglebert and J.-F. Hennequin, J. Microsc. Spectrosc. Electron. 7, 257 (1982)Google Scholar
  9. 9.
    H.H. Andersen and H.L. Bay, in : Sputtering by Particle Bombardment I, ed. by R. Behrisch (Springer Verlag, Berlin-Heidelberg-New York), Topics Appl. Phys. 47, 145 (1981)Google Scholar
  10. 10.
    G. Blaise and G. Slodzian, C.R. Acad. Sci. (Paris) B 271, 1216 (1970)Google Scholar
  11. 11.
    R.-L. Inglebert and J.-F. Hennequin, in : Secondary Ion Mass Spectrometry, SIMS III, Springer Series in Chemical Physics, 19, 57 (1982)Google Scholar
  12. 12.
    H. Oechsner, Appl. Phys. 8, 185 (1975)CrossRefGoogle Scholar
  13. 13.
    A.R. Bayly and R.J. MacDonald, Rad. Eff. 34, 169 (1977)CrossRefGoogle Scholar
  14. 14.
    T.R. Lundquist, J. Vac. Sci. Technol. 15, 684 (1978)CrossRefGoogle Scholar
  15. 15.
    M.J. Vasile, Surf. Sci. 115, L 141 (1982)CrossRefGoogle Scholar
  16. 16.
    K. Wittmaack, Nucl. Instrum. Meth. 170, 565 (1980)CrossRefGoogle Scholar
  17. 17.
    J.-F. Hennequin, R.-L. Inglebert and P. Viaris de Lesegno, submitted to Surf. Sci.Google Scholar
  18. 18.
    J. Schou and W.O. Hofer, Appl. Surf. Sci. 10, 383 (1982)CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • R.-L. Inglebert
    • 1
  • J.-F. Hennequin
    • 1
  1. 1.C.N.R.S., Laboratoire P.M.T.M.Université Paris-NordVilletaneuseFrance

Personalised recommendations